An optical system wavefront measurement device and method
An optical system and wavefront measurement technology, applied in the field of optical detection, can solve problems such as low detection accuracy and environmental disturbance, and achieve the effects of accurate defocus, high real-time performance, and strong vibration resistance
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[0060] The present invention will be described in detail below in conjunction with the accompanying drawings.
[0061] Such as figure 1 , 2 As shown, the wavefront measurement device 2 provided by the present invention is composed of a spliced beamsplitter prism 3 and a detector 4 . The spliced dichroic prism 3 is formed by gluing the first dichroic prism 5, the second dichroic prism 6 and the third dichroic prism 7, and the material of the prisms can be general glass material.
[0062] The first dichroic prism 5 comprises the first prism surface 8, the second prism surface 9, the third prism surface 13, the fourth prism surface 16 and the fifth prism surface 12; the first prism surface 8, the second prism surface 9, the third prism surface 13. The surface 16 of the fourth prism is coated with an antireflection film, and the surface 12 of the fifth prism is coated with a high reflection film.
[0063] The second dichroic prism 6 includes a sixth prism surface 10 and a s...
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