A micro-component air tightness detection device

Abstract

The invention provides a micro-element air tightness detection device, which includes a fixing seat, a lifting device, a hollow tube, a detection seat, and a gas pipe. On the device and controlled by it to move up and down, the detection seat is set directly below the hollow tube, one end of the air tube is connected to the compressed air supply equipment, and the other end is connected to the detection seat; a contact is arranged at the bottom of the hollow tube, and a through hole is arranged in the contact 1. There is a spring in the through hole and a sealing pressure block is embedded in the end of the through hole through the bayonet; a positioning block for fixing micro components is provided on the top of the detection seat, and the positioning block is provided with a through hole communicating with the air pipe two. The invention utilizes the sealing press block and the micro-component to cooperate to form a mating surface, and judges whether the air-tightness of the micro-component meets the requirements by using whether the detection liquid produces bubbles.

Description

technical field [0001] The invention relates to the field of micro-component production, in particular to a micro-component air tightness detection device. Background technique [0002] With the rapid development of technology, all walks of life have begun to use sensors as the first step towards intelligent manufacturing. In some sensors, micro components need to be used for sealing, but due to the particularity of their use environment (high temperature, oily, etc.), flexible seals such as rubber cannot be used, and metal parts must be used for sealing. Therefore, the machining accuracy of this type of micro-component is extremely high, and it is very necessary to perform air-tightness testing on it. [0003] At present, many leak detectors are purchased in the industry for air tightness testing, including two methods: differential pressure detection and helium mass spectrometry leak detection. Air at a certain pressure, the pressure change in the sealed cavity is obtain...

AI Technical Summary

Problems solved by technology

However, there are many problems in these two methods: 1. The detection time is long, and the efficiency is too low during mass production; 2. The leak detector is expensive, and if a large batch of detection is required, it needs to be purchased in large quantities, which greatly increases the production cost; 3. Micro-components are small in size, requiring the use of high-precision leak detectors, which further increases the cost; 4. There are missed inspections. When some parts have large leaks, the air pressure has reached equilibrium before the detection or the leak detection gas Has leaked from the part, the leak cannot be detected

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