Flexible smart piezoelectric sensor based on pentacene organic field-effect transistor coupled with PVDF nanopillars

An intelligent piezoelectric and pentacene technology, which can be used in the manufacture of semiconductor devices, electro-solid devices, and semiconductor/solid-state devices, and can solve the problems of low piezoelectric strain constant and limited charge.

Active Publication Date: 2022-03-29
UNIV OF JINAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the low piezoelectric strain constant of the material itself, the amount of charge generated under the small deformation force is limited, and the need for high-precision instruments to measure it restricts its application in the field of pressure sensing.

Method used

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  • Flexible smart piezoelectric sensor based on pentacene organic field-effect transistor coupled with PVDF nanopillars
  • Flexible smart piezoelectric sensor based on pentacene organic field-effect transistor coupled with PVDF nanopillars
  • Flexible smart piezoelectric sensor based on pentacene organic field-effect transistor coupled with PVDF nanopillars

Examples

Experimental program
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Effect test

Embodiment 1

[0048] (1) Ultrapure water, acetone solution, and isopropanol were used to ultrasonically clean the experimental-grade PET film substrate for 10 minutes, and then the PET substrate was cleaned with an oxygen plasma cleaner for 10 minutes and dried in a nitrogen environment; the clean PET substrate was placed on the into the metal vacuum coater to the s -1 Deposit Al with a thickness of about 100nm as the bottom gate electrode; Next, configure a PMMA solution of 7mg / ml and use a spin coater to form a PMMA film of about 400nm on the aluminum electrode at a rate of 4000rpm as the dielectric layer of the device, and in a vacuum Treat in a drying oven at 60°C for 2 hours; then use an organic vacuum coater to the s -1 Deposit 40nm-thick organic small molecule material pentacene at a rate of 40nm to form an active layer to transport charges; then use a transmission electron microscope copper mesh (200um in length, 40um in width, and 20um in channel width) as a mask on the pentace...

Embodiment 2

[0052] (1) Ultrapure water, acetone solution, and isopropanol were used to ultrasonically clean the experimental-grade PET film substrate for 10 minutes, and then the PET substrate was cleaned with an oxygen plasma cleaner for 10 minutes and dried in a nitrogen environment; the clean PET substrate was placed on the into the metal vacuum coater to the s -1 Deposit Al with a thickness of about 100nm as the bottom gate electrode; Next, configure a PMMA solution of 7mg / ml and use a spin coater to form a PMMA film of about 400nm on the aluminum electrode at a rate of 4000rpm as the dielectric layer of the device, and in a vacuum Treat in a drying oven at 60°C for 2 hours; then use an organic vacuum coater to the s -1 Deposit 40nm-thick organic small molecule material pentacene at a rate of 40nm to form an active layer to transport charges; then use a transmission electron microscope copper mesh (200um in length, 40um in width, and 20um in channel width) as a mask on the pentace...

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Abstract

The invention discloses a flexible intelligent piezoelectric sensor based on the coupling of a pentacene organic field effect transistor and a PVDF nanocolumn and a preparation method thereof. The method is as follows: first preparing a pentacene organic field effect transistor as a pressure sensor, The PVDF flexible material with nanopillars is coated with Au film on both sides of the PVDF flexible material to obtain a PVDF flexible piezoelectric material as a piezoelectric signal generating unit, and then a conductive material is used to form a closed loop between the piezoelectric signal generating unit and the pressure sensor. By testing the electrical characteristics of pentacene organic field effect transistors, the transfer characteristic curve, output characteristic curve, linear region and saturation region of the device work are obtained to know the mobility and switch ratio of the device; by testing the weight effect of different masses The electrical characteristics of the flexible smart piezoelectric sensor were obtained with the lowest detection limit and sensitivity, and the linear relationship of the electrical characteristics at different bending angles at the human wrist.

Description

technical field [0001] The invention relates to the technical field of flexible piezoelectric sensors, in particular to a flexible intelligent piezoelectric sensor based on the coupling of pentacene organic field effect transistors and PVDF nanocolumns. Background technique [0002] The tactile sensing of the current commercialized robot system has been lagging behind other sensing technologies due to the difficulties in design and fabrication technology, and cannot realize real intelligent applications. Robot smart electronic skin is a flexible electronic system developed by using technologies such as smart materials, micro-electromechanical systems and sensors, which can imitate the protection and perception of human skin. It is an important way to realize the tactile function of robots. [0003] The flexible piezoelectric material PVDF is an organic ferroelectric material, which has the advantages of flexible material, low density, low impedance and high voltage constant....

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L25/16H01L21/50
CPCH01L25/16H01L21/50
Inventor 张丛丛刘宏王建孙铭远
Owner UNIV OF JINAN
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