Automatic sheet inserting machine

A chip insertion machine and automatic technology, applied in the direction of conveyor objects, sustainable manufacturing/processing, electrical components, etc., can solve problems affecting the quality of silicon wafers, pollution of quartz boats, and high labor intensity, so as to improve transportation efficiency and avoid Effects of damaging silicon wafers and reducing labor intensity

Pending Publication Date: 2020-07-31
无锡森顿智能科技有限公司
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  • Claims
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AI Technical Summary

Problems solved by technology

Before this process, it is necessary to manually move the quartz boat to the diffusion furnace. After the process is completed, it will be manually moved out of the diffusion furnace, and then the silicon wafers on the quartz boat will be transferred from the quartz boat to the flower basket to flow to the next process. The method of silicon wafers is labor intensive, time-consuming and labor-intensive, which is likely to affect the quality of silicon wafers and cause pollution to the quartz boat

Method used

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  • Automatic sheet inserting machine
  • Automatic sheet inserting machine
  • Automatic sheet inserting machine

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Embodiment Construction

[0036] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0037] The automatic inserting machine claimed for protection in the present invention will be described in detail below with reference to the accompanying drawings as an example, but it can be understood by those skilled in the art.

[0038] Such as figure 1 As shown, the automatic inserting machine includes a workbench 1 on which at least one quartz boat transfer device 2, at least one ejector device 3, at least one clamping device 4, at least one multi-axis servo device 5, At least one suction device 6 and at least one flower basket transfer device, at least one quartz boat transfer device 2 is...

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Abstract

The invention relates to an automatic sheet inserting machine, which comprises a workbench provided with at least one quartz boat transferring device, at least one ejection device, at least one clamping device, at least one multi-axis servo device, at least one suction device and at least one basket transferring device, wherein the at least one quartz boat transferring device is used for the linear motion of a quartz boat, the at least one basket transferring device is used for the linear motion of a basket, the at least one clamping device is installed on the multi-axis servo device and is used for clamping a silicon wafer, and the at least one suction device is installed at the at least one motion end of the multi-axis servo device and is used for sucking the silicon wafer. Compared withthe prior art, the automatic sheet inserting machine of the invention solves the problem of the traditional manual carrying mode, has the advantage of being high in automation degree, saves time andlabor, reduces the labor intensity of workers, and improves the silicon wafer conveying efficiency of enterprises.

Description

technical field [0001] The invention relates to the field of automation equipment, in particular to an automatic inserting machine. Background technique [0002] At present, in the solar cell diffusion process, the quartz boat is used as the carrier of the silicon wafer for the diffusion process in the quartz furnace tube, and its temperature resistance can reach above 800°C. Before this process, it is necessary to manually move the quartz boat to the diffusion furnace. After the process is completed, it will be manually moved out of the diffusion furnace, and then the silicon wafers on the quartz boat will be transferred from the quartz boat to the flower basket and flowed to the next process. The method of silicon wafers is labor intensive, time-consuming and laborious, and it is easy to affect the quality of silicon wafers and cause pollution to the quartz boat. Contents of the invention [0003] In view of the above-mentioned shortcomings of the prior art, the purpose...

Claims

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Application Information

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IPC IPC(8): H01L21/677H01L31/18
CPCH01L21/67763H01L21/67778H01L31/1876Y02P70/50
Inventor 季徐华杨海波
Owner 无锡森顿智能科技有限公司
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