Advanced treatment and recycling system and process for fluorine-containing wastewater in electronic industry

Abstract

The invention relates to an advanced treatment and recycling system and process for fluorine-containing wastewater in the electronic industry. The system comprises an adjusting tank, a first multi-medium filter, an activated carbon filter, a softening device, a filtering water tank, a security filter, an RO system, a fluorine-containing wastewater temporary storage tank, a high-concentration fluorine-containing wastewater primary chemical mixing system, a high-concentration fluorine-containing wastewater secondary deep fluorine removal system, a second multi-medium filter, a fluorine removal resin tower and a discharge tank which are sequentially connected through pipelines, the adjusting tank is connected with a fluorine-containing wastewater inlet pipe, and the discharge tank is connected with a standard-meeting discharge pipe. The process comprises the following steps: 1, fluorine-containing wastewater adjusting; 2, reverse osmosis filtering; 3, high-concentration fluorine-containing wastewater primary chemical mixing; 4, secondary deep defluorination of the high-concentration fluorine-containing wastewater; and 5, fluorine removal using a resin. The advanced treatment and recycling of the fluorine-containing wastewater in the electronic industry are realized by adopting a process of combining RO concentration, two-stage chemical mixing, addition of a fluorine removal agentand fluorine removal resin.

Description

technical field [0001] The invention relates to a technology for the advanced treatment of fluorine-containing wastewater in the electronics industry, in particular to a system and process for the advanced treatment and reuse of fluorine-containing wastewater in the electronics industry, and belongs to the technical field of water treatment. Background technique [0002] In the production process of products in the electronics industry (such as semiconductors, panels, photovoltaics, etc.), due to the use of materials such as hydrofluoric acid and ammonium fluoride in pickling operations and wet etching processes, wastewater containing fluoride ions will be generated. This kind of fluorine-containing wastewater is usually the second and third cleaning water of the process, which has the characteristics of large water volume, less impurities, and acidic influent (pH is about 1-3). [0003] In the prior art, fluoride ions in water are often removed by adding calcified mixed sed...

AI Technical Summary

Problems solved by technology

[0008] The present invention proposes a system and process for the advanced treatment and reuse of fluorine-containing wastewater in the electronics industry. It is difficult to take into account the treatment effect and economy, and at the same time, it is impossible to realize the recycling and reuse of fluorine-containing wastewater. To provide a method that can effectively reduce the cost of chemical dosing, reduce the consumption of resin, save energy and reduce consumption, and finally realize the reuse of wastewater. Fluorine-containing wastewater advanced treatment process

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