Method and system for calibrating step gauges that can eliminate Abbe errors based on laser interferometry

A technology of laser interference and Abbe error, applied in instruments, measuring devices, mechanical measuring devices, etc., can solve problems such as difficult implementation and complex system structure, and achieve the effect of convenient measurement accuracy

Active Publication Date: 2021-11-30
NAT INST OF METROLOGY CHINA
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Problems solved by technology

The system adopts the displacement measurement method based on the principle of vacuum interference, which has high precision, but the system structure is relatively complicated and difficult to realize

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  • Method and system for calibrating step gauges that can eliminate Abbe errors based on laser interferometry
  • Method and system for calibrating step gauges that can eliminate Abbe errors based on laser interferometry
  • Method and system for calibrating step gauges that can eliminate Abbe errors based on laser interferometry

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Embodiment Construction

[0028] In order to better understand the present invention, the technical solutions in the embodiments of the present invention will be described in contemplation, and It is an embodiment of the invention, not all of the embodiments. Based on the embodiments in the present invention, those of ordinary skill in the art may belong to the scope of the present invention in the range of the present invention without all other embodiments obtained without making creative labor.

[0029] Following with reference to embodiments of the present application will be described, but not limit the present invention.

[0030] like figure 1 with figure 2 Shown, one kind of embodiment of the present invention provides a laser interferometer can be eliminated based on the structure diagram of the calibration system Gauge step Abbe error, the system comprises a laser interferometric measuring unit and data processing unit;

[0031]The interference measuring unit includes a first laser interference op...

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Abstract

The invention mainly relates to the technical field of length measurement, and provides a step gauge calibration system based on laser interference that can eliminate Abbe errors, including: 3-way laser interference optical paths that can form any triangular prism in space, and set in space The fourth laser interference optical path used for wavelength compensation inside and parallel to the three laser interference optical paths. Part of the laser beam emitted by the laser is reflected to the interference mirror as a reference signal after passing through the beam splitter. The measurement signal is formed in the mirror, and when the measured step gauge is displaced, the displacement value of the measured step gauge that eliminates the Abbe error is obtained through the measurement signal and reference signal and calculated according to the measurement model, and the three laser light paths are synthesized into the measured step gauge. The measurement model on the step gauge measurement line, no matter where the step gauge is installed on the measuring platform of the coordinate measuring machine, can very conveniently realize the measurement accuracy of the laser interferometry step gauge based on Abbe's principle.

Description

Technical field [0001] Technical Field The present invention relates to the length measurement, and particularly to a laser interferometer can eliminate the Abbe error step gauge based on the calibration method and system. Background technique [0002] Step gauge length as a generic kind of measuring instruments, due to the step gauge with high accuracy, consistency is good, therefore, Bureau of Weights and Measures (BIPM) to step gauge included in the amount of international crucial than the length of the project , making it an important symbol to measure a country's geometric calibration laboratories. Widely used in precision and calibration value transfer coordinate measuring machine, CNC machine tools, measuring tools and other precision instruments spectrometer. [0003] Thus, Japanese National Measurement Institute (abbreviated NMIJ) on the basis of the coordinate measuring machine, to achieve a large displacement measuring interferometer length measuring system 4 set up by...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B5/02
CPCG01B5/02G01B21/042
Inventor 任国营
Owner NAT INST OF METROLOGY CHINA
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