Method and device for improving micro-deformation loading precision

Abstract

The invention discloses a method for improving the precision of a micro-deformation loading device. A test piece made of a constant-elasticity alloy material is divided into a central displacement area, a middle ring elastic deformation area and a peripheral fastening area, the test piece is designed and assembled in a split manner to form a test piece assembly so as to eliminate the influence ofthe deformation caused by machining of a disc-shaped thin-wall area of the test piece and the deformation of a cutting residual stress deformation area generated in the machining process, and displacement errors caused by threaded connection gaps or contact force deformation at the joint of a high-precision driving device and the test piece are reduced through the connection mode of an outer circle at the output interface of a radial enclasping driving device and an outer circle of the cylindrical extending end of the test piece. According to the method and the device, the deformation hysteresis caused by internal stress after the elastic deformation area of the test piece is deformed is reduced, and the displacement errors caused by connection contact force deformation or connection clearance between the driving device and the test piece is reduced, so that the uncertainty of the micro-deformation loading device can be greatly reduced.

Description

technical field [0001] The invention relates to a technology in the field of deformation measurement, in particular to a method and a device for improving the accuracy of micro-deformation loading. Background technique [0002] The current deformation measurement technology mainly traces the source through the wavelength, and theoretically analyzes the influencing factors of the environment, so as to evaluate the uncertainty of the measurement system. Obviously, this method lacks experimental verification and calibration. The existing high-precision micro-deformation loading device is realized by micro-deformation loading, and micro-deformation loading is applied to the deformation process of the object, which involves two processes of micro-deformation transmission and object deformation. The precision requirement from nm to tens of nm, the transfer process of micro-deformation is easily affected by the micro-gap of the connection (such as thread gap), which makes the trans...

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Problems solved by technology

[0003] Aiming at the shortcomings of the existing micro-deformation loading uncertainty, the present invention proposes a method and device for improving the micro-deformation loading accuracy, reducing the deformation hysteresis caused by the internal stress of the elastic deformation area of ​​the test piece and reducing the driving device and the test device. The method and device for the displacement error caused by the connection contact force deformation or the connection gap between parts can greatly reduce the uncertainty of the micro-deformation loading device, making it applicable to the field of deformation measurement and calibration requiring high precision

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