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A kind of miniaturized fully integrated ndir gas sensor and its preparation method

A gas sensor, fully integrated technology, applied in instruments, scientific instruments, measuring devices, etc., can solve the problems of insufficient integration and low sensitivity of NDIR gas sensors

Active Publication Date: 2021-04-20
HUAZHONG UNIV OF SCI & TECH +1
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Problems solved by technology

[0004] In view of the defects of the prior art, the purpose of the present invention is to provide a miniaturized fully integrated NDIR gas sensor and its preparation method, aiming to solve the problems of insufficient integration and low sensitivity of the existing NDIR gas sensors

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  • A kind of miniaturized fully integrated ndir gas sensor and its preparation method
  • A kind of miniaturized fully integrated ndir gas sensor and its preparation method
  • A kind of miniaturized fully integrated ndir gas sensor and its preparation method

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[0038] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0039] Such as Figure 1-2 As shown, the embodiment of the present invention provides a miniaturized fully integrated NDIR gas sensor, including a photodetector 1 , a MEMS infrared light source 2 , an upper silicon wafer 3 , a lower substrate 4 , and a signal processing ASIC chip 5 . After the upper silicon wafer 3 and the lower substrate 4 are bonded, the space formed between them is the gas chamber cavity 401 . A layer of gold reflective layer 6 is evaporated in the gas chamber, and the light emitted by the MEMS infrared light source 2 can undergo multiple reflections through the gold reflective...

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Abstract

The invention discloses a miniaturized fully integrated NDIR gas sensor and a preparation method thereof, belonging to the technical field of infrared gas sensors. The sensor includes a photodetector, a MEMS infrared light source, an upper silicon chip, a lower substrate and a signal processing ASIC chip; There are gas diffusion grooves distributed on the joint surface; the photodetector, MEMS infrared light source and signal processing ASIC chip are arranged on the upper part of the gas chamber, and the upper silicon chip is provided with the photodetector and MEMS respectively. The photodetector window of the infrared light source and the infrared light source window, the light emitted by the MEMS infrared light source enters the reflective layer from the infrared light source window, and enters the photodetector after multiple reflections. The invention realizes the further miniaturization and full integration of the NDIR gas sensor by utilizing the MEMS technology, and improves the sensitivity.

Description

technical field [0001] The invention belongs to the technical field of infrared gas sensors, and more specifically relates to a miniaturized fully integrated NDIR gas sensor and a preparation method thereof. Background technique [0002] Gas sensors are one of the most effective ways to obtain gas information in real time and in situ, and play an irreplaceable and important role in environmental protection, security alarm, process industry and other fields. The NDIR infrared gas sensor based on the non-dispersive infrared (Non-Dispersive Infra-Red, NDIR) absorption principle is based on the near-infrared spectrum selective absorption characteristics of different gas molecules, and uses the relationship between gas concentration and absorption intensity (Lambert-Beer's law) to identify gas groups A gas sensing device that separates and determines its concentration. After decades of technological development and breakthroughs, the sensitivity, response time and anti-interfere...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/3504
CPCG01N21/3504
Inventor 刘欢邢朝洋朱政强崔尉李华曜严棋胡志响谈小超翟博慧田枝来
Owner HUAZHONG UNIV OF SCI & TECH
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