Long-range optical surface shape detection device and method

Abstract

The invention relates to a long-range optical surface shape detection device and detection method. The surface shape detection device comprises a detection light path and an f-theta angle detection system used for forming a measurement light spot. in the detection light path, an incident light path directly incident to the surface of the optical device to be measured is provided with a double-wedge mechanism; the double-wedge mechanism comprises two single wedge-shaped wedges which are arranged at intervals along the incident light path, the incident light path penetrates through the two single wedge-shaped wedges, and the two single wedge-shaped wedges can rotate independently so as to change the angle of the emergent light path of the two single wedge-shaped wedges through rotation and enable the emergent light path to be incident to the surface of the optical device to be measured in a normal incidence mode. According to the invention, the reflected light path returns along the original path of the incident light path by rotating the wedge, and judgment can be carried out in combination with measurement light spots; the surface shape of the to-be-detected optical device is obtained through the wedge rotation amount, and the action positions of the optical paths on all the optical elements are consistent, so that the angle errors of all the optical elements introduced by thetransverse movement amount in a traditional system can be completely avoided, and the detection precision is improved.

Description

technical field [0001] The invention belongs to the technical field of surface shape detection of long-range mirrors, and in particular relates to a long-range optical surface shape detection device and detection method. Background technique [0002] With the continuous development of science and technology, various application fields have put forward higher requirements for the detection of mirror surface shape. In order to improve the detection capability of the long-range surface profiler, it is necessary to correct or eliminate various system errors. Among these system errors, the most important type is introduced due to the slight difference between the optical elements used in the optical path system of the long-range surface profiler and the ideal optical elements, which are mainly manifested in two aspects: [0003] On the one hand, the small processing difference between the surface shape of each reflective optical element in the optical path system and the surface...

AI Technical Summary

Problems solved by technology

[0009] As can be seen above, in the existing long-distance surface shape measurement technical solutions, the purpose of reducing optical elements and reducing optical elements that introduce errors is achieved through structural changes, and the systematic error has not been completely or better eliminated, and through The difference between the landing points of the measuring spot on the area array detector (CCD) of the f-θ angle detection system is used to feed back the surface shape of the optical device under test, and there are also area array detectors inevitably. The processing inhomogeneity of pixels, the inconsistency of photoelectric response efficiency, and the consistency of electronic circuits, etc., lead to system errors. In theory, the greater the distance between the Fourier transform lens and the area array detector, the higher the resolution , in the current detection form, the larger the distance, the more errors will be introduced at different points on the area array detector (CCD), which is contradictory

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