Flexible micro-nano electrode array implantable chip and production method thereof

Abstract

The invention provides a flexible micro-nano electrode array implantable chip and a production method thereof. The micro / nano electrode array implantable chip sequentially comprises a base layer, an electroconductive layer and an insulating layer from bottom to top. The base layer made of a flexible material is of a T-shaped structure with a pointed front end. The electroconductive layer formed onthe base layer is used for detecting dual-mode neural signals in a plurality of nucleus regions of the brain. The electroconductive layer comprises a dual-mode detection electrode array formed at thefront end of the base layer, and the dual-mode detection electrode array is used for detecting the dual-mode neural signals in the nucleus regions of the brain. The dual-mode detection electrode array comprises a plurality of electrophysiological detection sites and a plurality of electrochemically sensitive detection sites, which are arranged along the longitudinal direction of the front end anddistributed in a plurality of to-be-detected nucleus regions. The insulating layer is made of a flexible material. The flexible micro-nano electrode array implantable chip and the production method thereof have the advantages that an effective detection measure and an effective detection tool are provided for long-term detection of the neural signals, and the chip is of great significance in terms of reduction of inflammations in the brain, detection of multiple brain regions, lesion discovery based on functional positioning by two types of the neural signals, and the like.

Description

Technical field [0001] The present disclosure relates to the field of micro-processing technology of biosensors, in particular to a flexible micro-nano electrode array implantable chip for dual-mode high-resolution functional positioning and a preparation method thereof. Background technique [0002] The brain is the human high-level nerve center. The intricate neural network conducts nerve signals through nerve synapses to complete daily decision-making, thinking, learning, and action functions. The conduction signals between nerve synapses mainly include the release of various neurotransmitters and the conduction of nerve electrical signals. Most neurodegenerative diseases or neuromotor disorders are related to abnormal neurotransmitter concentration and abnormal neuroelectric signal. In the relevant nucleus area, the electrical and chemical signals of neurological diseases have different characteristics. Detecting these characteristics will help to further grasp and understan...

AI Technical Summary

Problems solved by technology

However, due to the large difference between the Young's modulus of rigid materials such as silicon and nerve tissue, the implantation of neurotransmitters often easily causes a large number of inflammatory reactions in cell tissues, which greatly reduces the detection efficiency. It is necessary for long-term and efficient detection of nerve signals. a huge challenge

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