Optical detection system and method

Abstract

The invention relates to the field of optical technology, and discloses an optical detection system and method to quickly complete defect detection on the surface of an object. The system of the present invention includes: a multi-spectral light source; a deflection device located between the multi-spectral light source and the object to be measured, for deflecting the beams of different wavelengths emitted from the multi-spectral light source to directions corresponding to the wavelengths on, and emit the deflected light beams of different wavelengths to the object to be measured; the data processing device is used to receive the light beam reflected by the surface of the object to be measured, and compare the reflection spectrum with the reference calibration spectrum reflected by the corresponding standard part Spectral difference comparison is performed to determine the wavelength of the difference, and then the spatial coordinates corresponding to the surface defects of the object to be measured are calculated according to the wavelength of the difference.

Description

technical field [0001] The invention relates to the field of optical technology, in particular to an optical detection system and method. Background technique [0002] With the development of modern industrial technology, the requirements for high-precision processing technology are getting higher and higher. At the same time, surface inspection has become an indispensable part of industrial development, which reflects a country's industrial development level to a certain extent. [0003] Surface detection usually uses the changes of heat, sound, light, electricity, magnetism and other reactions caused by abnormal material surface structure or defects or foreign objects, and uses physical or chemical methods as means, with the help of modern technology and equipment, to detect the surface defects of the tested parts ( or foreign matter) to detect the type, nature, quantity, shape, position, size, distribution and changes thereof. [0004] Traditional optical surface defect ...

AI Technical Summary

Problems solved by technology

For example, the scattered energy analysis method has a complex system, slow detection speed, and cannot determine the specific location of the defect; the spectrum analysis method is greatly affected by the deep structure of the defect, and cannot reflect the size of the surface layer of the defect; the interference fringes of the double-beam interference method are easy to drift, And it is not suitable for a variety of defect detection; the filter imaging method is aimed at imaging high-frequency components or low-frequency components in the spatial spectrum of the beam, which is greatly affected by noise interference

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