Concave surface array graphene-metal heterojunction photoelectric detector

Abstract

The invention discloses a concave surface array graphene-metal heterojunction photoelectric detector which can increase the light receiving surface, increase the light absorption of graphene and avoidthe damage to the graphene in the transfer process. The photoelectric detector comprises a substrate, wherein an insulating layer, a growth layer and a graphene layer are sequentially arranged on thesubstrate from bottom to top; the substrate is provided with grooves which are distributed in an array mode and are sunken downwards; a first convex surface matched with the groove is arranged on theinsulating layer; a second convex surface is arranged on the growth layer; a third convex surface is arranged on the graphene layer; an antireflection layer is arranged on the inner wall of the innergroove of the third convex surface of the graphene layer; and a wave-shaped interdigital high work function electrode and a wave-shaped interdigital low work function electrode are respectively arranged at two sides of the inner groove of the third convex surface on the graphene layer. The photoelectric detector is small in size, high in integration level, is wide in recognition range and the like.

Description

technical field [0001] The invention relates to the fields of communication and sensors, in particular to a graphene-metal heterojunction photodetector with a concave array. Background technique [0002] It is well known that the principle of the photodetector is that the conductivity of the irradiated material is changed by radiation. Photodetectors are widely used in various fields of military and national economy. In the visible or near-infrared band, it is mainly used for ray measurement and detection, industrial automatic control, photometry, etc.; in the infrared band, it is mainly used for missile guidance, infrared thermal imaging, infrared remote sensing, etc. [0003] The current mainstream structure of graphene photodetectors is a planar structure, so the light receiving surface is small, and graphene absorbs less light, and the general graphene photodetectors transfer the prepared graphene to the detector On the substrate, graphene is therefore prone to damage ...

AI Technical Summary

Problems solved by technology

[0003] The current mainstream structure of graphene photodetectors is a planar structure, so the light receiving surface is small, and graphene absorbs less light, and the general graphene photodetectors transfer the prepared graphene to the detector on the substrate, so graphene is prone to damage during the transfer process

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