A Relative Swing Arm Type Profiler and Detection Method for Mirror Surface Inspection

Abstract

The invention discloses a relative swing arm profilometer for mirror inspection and a detection method. A profilometer relative mirror attitude detection structure is mounted below a swing arm profilometer, the profilometer relative mirror attitude detection structure comprises three attitude sensors, the mounting points of the three attitude sensors form a triangle, the triangle is perpendicularto a rotating shaft of the swing arm profilometer, the axis of the rotating shaft passes through the center of the triangle, the swing arm profilometer uses a hollow air floating turntable provided with a center hole, and the profilometer relative mirror attitude detection structure penetrates through the center hole to be connected to the non-rotating part of the swing arm profilometer. The relative swing arm profilometer disclosed by the invention also comprises a probe tilt attitude precision adjustment structure. The relative swing arm profilometer for mirror inspection and the detection method of the invention improve the accuracy of detection results.

Description

technical field [0001] The invention belongs to the field of optical mirror surface shape detection, and in particular relates to a swing arm type profiler, which is used for detection in the stage of fine grinding of optical mirror surfaces. Background technique [0002] The surface error of the optical mirror surface in the fine grinding stage is greater than 2 microns, and the surface is rough, so optical interference detection cannot be used, and point-by-point contour detection is usually used. When the caliber reaches more than 1 meter, in order to avoid the risks brought by handling between processing equipment and inspection equipment and shorten the manufacturing cycle, it is recommended to adopt the inspection method at the station. Swing arm profiler is a common method for inspection of mirror fine grinding stage. It has the advantages of less degrees of freedom, high precision and in-situ inspection, but it still has the following disadvantages: [0003] (1) It ...

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Problems solved by technology

[0003] (1) It is an absolute measurement, the system error cannot be calibrated, and the accuracy and reliability of the test results are insufficient;

[0004] (2) It is difficult to determine the spatial position of the profiler and the detected mirror surface, which makes it difficult to adjust the attitude of the profiler, and it is difficult to deduct the jump error (caused by the rotation of the mirror surface) in the detection result;

[0005] (3) It is difficult to adjust the precision measurement sensor, and the conventional horizontal and vertical adjustment cannot ensure that the sensor is aligned with the mirror along the normal line

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