Device and method for actively inhibiting rollback movement of parasitic motion principle piezoelectric actuator

Abstract

The invention relates to a device and a method for actively inhibiting the rollback movement of a parasitic motion principle piezoelectric actuator, and belongs to the field of precision machinery. The device comprises a foundation bed, a movable sub unit, a driving unit and a pre-pressure regulation unit, wherein the movable sub unit is installed on the boss of the foundation bed; the pre-pressure regulation unit is fixed on the foundation bed through bolts; and the driving unit is installed on the pre-pressure regulation unit. By use of the method, through a synergistic effect of a driving piezoelectric stack and an improving piezoelectric stack in the driving unit, the pressure of the parasitic principle piezoelectric actuator is constant in a driving process so as to realize the activeinhibition of the rollback movement. The device and the method have the advantages that the rollback movement can be obviously inhibited, ideal stepping movement is realized, and an influence generated by system nonlinearity can be eliminated to a certain degree so as to be convenient for subsequent precise control. The device and the method have a wide application prospect in the fields including precise and ultraprecise positioning, precise measurement, precise machining and assembling, biological inheritance engineering, material surface performance detection and the like.

Description

technical field [0001] The invention relates to the field of precision machinery, in particular to a device and method for actively suppressing the retreating motion of a piezoelectric driver based on the principle of parasitic motion. The present invention solves the problem of retreat caused by parasitic motion in principle, realizes ideal stepping motion without retreat, and is convenient for subsequent precise control. It can be used in precision positioning, precision measurement, precision optics, precision / ultra-precision machining and other fields to achieve high-precision linear positioning. Background technique [0002] With the increasing demand for micro / nano processing, positioning, and measurement, the demand for high-precision positioning platforms is becoming increasingly urgent. A piezoelectric stack made of piezoelectric material can be applied with a certain driving voltage, and under the action of its inverse piezoelectric effect, it can produce micro-na...

AI Technical Summary

Problems solved by technology

Ultrasonic piezoelectric drive has the advantages of low noise, high torque, and no back-off phenomenon (Sensors and Actuators A: Physical, 285, 182-189, 2019), but due to the use of the resonance drive principle, the drive has a short service life, is easy to wear, Poor cooling performance and unstable output curve

Inertial and stick-slip drives have the advantages of simple control, fast response, low cost, and simple structure, but their carrying capacity is small, and they are prone to overturning moments. Prospects are greatly limited

The inchworm piezoelectric actuator can achieve a large torque through the clamping mechanism, theoretically infinite travel and no backlash phenomenon (Sensors and Actuators A: Physical, 194, 269-276, 2013), but its structure is much more complicated than other principles of the actuator , leading to difficulties in processing, assembly and control, and there is a large impact in the conversion from driving to clamping motion, which weakens the stability of its output motion to a certain extent

The characteristics of the parasitic piezoelectric actuator are similar to those of the stick-slip type. Through reasonable structural design, continuous linear (Review of Scientific Instruments, 83, 055002, 2012) or rotary drive (Review of Scientific Instruments, 84,096105,2013), but the parasitic motion increases the contact pressure while moving in the other direction, resulting in a large additional friction force, which makes the retraction phenomenon significant, and the driving efficiency and positioning accuracy are limited

[0003] To sum up, the current piezoelectric actuators may realize stepping motion without retraction, but the structure, processing, assembly and control are complicated, or the structure, processing, assembly and control are relatively simple, but there are some problems in the stepping motion process. obvious regression

Due to the back-off phenomenon, the driving performance of stick-slip, parasitic and inertial piezoelectric actuators is greatly limited

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