Piezoelectric ultrasonic transducer and working method thereof

Abstract

The invention relates to a piezoelectric ultrasonic transducer and a working method thereof. The piezoelectric ultrasonic transducer comprises a top electrode layer, a piezoelectric layer, a bottom electrode layer, a base layer and a fixing plate which are arranged in sequence from top to bottom, and the top electrode layer internally includes a central top electrode unit and N-1 peripheral top electrode units, and the peripheral top electrode units are evenly distributed around the central top electrode unit; each top electrode unit internally includes an inner electrode sheet and an outer electrode sheet, and the outer electrode sheets surround the inner electrode sheets; the inner electrode sheets of the N top electrode units are connected together, and the outer electrode sheets of theN top electrode units are connected together; N cavities are formed in the base layer, the N cavities are separately located right under the N top electrode units; and the piezoelectric ultrasonic transducer can operate in a differential electrode mode and a single electrode mode to emit and receive ultrasonic waves. The piezoelectric ultrasonic transducer has high ability to emit the ultrasonicwaves, is high in sensitivity when receiving ultrasonic waves, is simple in production, can be integrated into a large-scale array, and is diverse and flexible in working methods.

Description

(1) Technical field: [0001] The invention relates to an ultrasonic transducer and its working method, in particular to a piezoelectric ultrasonic transducer and its working method. (two), background technology: [0002] Ultrasonic detection (sensing) technology, as a kind of acoustic sensing technology, is a technology that uses the good directionality, strong penetrating ability and easy to obtain relatively concentrated characteristics of ultrasonic waves to detect physical characteristics such as distance and flow velocity. . Piezoelectric ultrasonic transducer, as the core component of high-end ultrasonic testing equipment, is an energy conversion device that uses piezoelectric effect and inverse piezoelectric effect to perform acoustic-electric and electrical-acoustic conversion. When some parameters of the ultrasonic sound wave emitted by the transducer change due to external physical quantities (such as measurement distance, liquid flow rate, object thickness, etc.),...

AI Technical Summary

Problems solved by technology

[0003] At present, piezoelectric ultrasonic transducers have problems such as weak sensitive signals, poor manufacturability, and inability to be arrayed on a large scale.

In the detection of physical quantities, the sensitive signal (sensitivity) is an important characterization quantity, especially for micro-integrated chips, the weak sensitive signal will make the chip cannot be used normally, and thus cannot be widely used.

Images