Photodetector based on tin selenide/silicon heterojunction, and preparation method thereof
A photodetector and silicon heterojunction technology, applied in the field of photodetection, can solve problems such as hindering the application of photodetectors, and achieve the effects of remarkable photoresponse performance, simple preparation method and low cost
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[0023] The present invention utilizes the magnetron sputtering method to deposit a SnSe thin film layer on the Si single crystal substrate to obtain a SnSe / Si heterojunction, and deposits the metal Pd front electrode through the DC magnetron sputtering technology and presses the metal In electrode and connects the metal wire, Form the device. When exposed to light conditions, due to the photoelectric effect and the existence of the built-in electric field, the device can exhibit obvious response performance to light when the applied voltage is 0 volts.
[0024] The present invention will be described in detail below in conjunction with the embodiments and accompanying drawings.
[0025] The invention is a photodetector based on tin selenide / silicon heterojunction, comprising a SnSe thin film layer and a Si single crystal substrate, the Si single crystal substrate is used as the carrier of the SnSe thin film layer, and the SnSe thin film layer is arranged on the surface of the ...
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