Method and system for increasing number of testing samples of high-temperature environment aging test

A technology of aging test and test samples, which is applied in the field of high-temperature environment aging test, can solve the problems of limiting test efficiency and the number of test samples can not be too many, and achieve the effect of saving power, increasing the number of test samples, and accurate and fast adjustment

Active Publication Date: 2019-04-12
山东阅芯电子科技有限公司
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Problems solved by technology

[0010] In summary, when using the current high-temperature environment test chamber for high-temperature environment aging life test, the number of test samples should not be too large, which limits the test efficiency

Method used

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  • Method and system for increasing number of testing samples of high-temperature environment aging test
  • Method and system for increasing number of testing samples of high-temperature environment aging test

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Embodiment Construction

[0031] The present invention will be further described below in conjunction with specific drawings and embodiments.

[0032] Such as figure 2 with image 3 Shown: In order to accurately and quickly adjust the opening degree of the damper, greatly increase the number of test samples allowed, and can save electric energy to the greatest extent, and ensure the smooth progress of the test. Environmental test chamber; also comprise the damper damper control mechanism that can control the damper damper 9 opening state of environmental test chamber, described damper damper control mechanism is electrically connected with system controller, configures temperature tolerance σ, The change step size Δβ of the opening angle α of the damper baffle 9, the temperature control feedback period T wait and the thermal balance perturbation period T check ; The method comprises the steps of:

[0033] Step S1, determine the target constant temperature T in the environmental test chamber accord...

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Abstract

The invention relates to a method and system for increasing the number of testing samples of a high-temperature environment aging test. The system comprises an environment test box capable of providing the required environment for conducting an environment aging test on a tested device, and further comprises an air door baffle control mechanism capable of controlling the opening state of an air door baffle of the environment test box. In the test process, according to the current opening angle alpha of the air door baffle and the current temperature T<real> in the environment test box, the opening angle alpha of the air door baffle is adjusted precisely and rapidly through an air door baffle control mechanism, and accordingly, the maximum allowable heating power of the testing system can be changed, so that on the one hand, the testing system can accommodate the more testing samples, on the other hand, electric energy can be saved to the maximum degree, and smooth conducting of the test is ensured.

Description

technical field [0001] The invention relates to a method and a system, in particular to a method and a system for increasing the number of test samples in a high-temperature environment aging test, belonging to the technical field of high-temperature environment aging tests. Background technique [0002] High temperature environmental aging life test is a common method to evaluate the quality of semiconductor devices, such as HTRB (High Temperature Reverse Bias, high temperature reverse bias test), HTGB (High Temperature Gate Bias, high temperature gate bias test), HTFB (High Temperature Forward Bias, high temperature Positive bias test), HTOL (High Temperature Operating Life, high temperature working life), etc. The principle of high-temperature environmental aging life test is to place semiconductor devices under high-temperature environmental conditions and apply specific electrical stress to quickly evaluate their life and reliability by accelerating the aging process of...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/26
CPCG01R31/2642
Inventor 张文亮雷小阳李文江朱阳军
Owner 山东阅芯电子科技有限公司
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