Three-degree-of-freedom large-stroke high-precision micro-positioning platform based on bridge-type amplifying mechanism

Abstract

The invention discloses a three-degree-of-freedom large-stroke high-precision micro-positioning platform based on bridge type amplification mechanisms. The three-degree-of-freedom large-stroke high-precision micro-positioning platform based on the bridge type amplification mechanisms comprises a base and an XY platform arranged in the base. The base and the XY platform are connected through four translation amplification mechanisms evenly distributed in the circumferential direction of the XY platform, and one of two adjacent translation amplification mechanisms is driven by a piezoelectric ceramic driver I and the other is driven by a piezoelectric ceramic driver II. A Z-direction mounting hole is formed in the middle part of the XY platform, and a Z-direction translation mechanism is arranged in the Z-direction mounting hole in a penetrating mode. The three-degree-of-freedom large-stroke high-precision micro-positioning platform is based on the bridge type amplification mechanisms, parallel connection and series connection are combined, three piezoelectric ceramic drivers are equipped, high-precision and large-stroke translation in the XYZ three directions is realized, and higherworking bandwidth and natural frequency are achieved.

Description

technical field [0001] The invention relates to a micro-positioning platform, in particular to an XYZ three-degree-of-freedom large-stroke high-precision micro-positioning platform based on a bridge-type amplification mechanism. Background technique [0002] With the development of science and technology, micro-nano technology has been widely used. However, the high-precision micro-positioning platform has always restricted the promotion of micro-nano technology. At present, the micro-positioning platform with small stroke has achieved a major breakthrough, but the micro-positioning platform with high precision, large stroke and XYZ three degrees of freedom still needs to be further improved. At present, the most common three-degree-of-freedom micro-positioning platforms with high precision and large travel are: X-direction translation, Y-direction translation and Z-direction rotation, and there is a lack of micro-positioning platforms that realize the three degrees of free...

AI Technical Summary

Problems solved by technology

However, the high-precision micro-positioning platform has always restricted the promotion of micro-nano technology

At present, the micro-positioning platform with small stroke has achieved a major breakthrough, but the micro-positioning platform with high precision, large stroke and XYZ three degrees of freedom needs to be further improved

At present, the most common three-degree-of-freedom micro-positioning platforms with high precision and large travel are: X-direction translation, Y-direction translation and Z-direction rotation, and there is a lack of micro-positioning platforms that realize the three degrees of freedom of XYZ translation

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