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A two-degree-of-freedom micro-nano positioning platform

A technology of micro-nano positioning and degree of freedom, which is applied in the direction of instruments and instrument parts, etc., and can solve the problems of force-displacement nonlinear effect, high concentrated stress of hinges, and strict installation space requirements of positioning platforms.

Active Publication Date: 2021-05-11
HANGZHOU DIANZI UNIV
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  • Abstract
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Problems solved by technology

[0003] In some occasions that require a large working stroke, a displacement amplification mechanism is usually designed and installed in the micro-nano positioning platform to amplify the output displacement of the driver, but at the same time the size of the positioning platform is increased, and some applications have strict requirements on the installation space of the positioning platform; In addition, although reducing the size of the flexible hinge in the guide mechanism can reduce the size of the positioning platform, it will bring about a force-displacement nonlinear effect or make the hinge concentration stress too high

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  • A two-degree-of-freedom micro-nano positioning platform
  • A two-degree-of-freedom micro-nano positioning platform

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Embodiment Construction

[0023] specific implementation plan

[0024] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0025] In the multi-degree-of-freedom micro-nano positioning platform, the effective decoupling mechanism can reduce the difficulty of control, improve the positioning accuracy and avoid the damage of the driver; therefore, an effective decoupling mechanism is developed, which has a large positioning stroke and a small hinge concentrated stress. A positioning platform structure with good force-displacement linearity and compactness is of great significance for improving the performance of the positioning system.

[0026] A two-degree-of-freedom micro-nano positioning platform, including a base 1, a motion platform 2, a guide mechanism 4, a decoupling mechanism 5, and a driver 6; a motion platform 2 is provided in the middle of the base 1, and the motion platform 2 passes around The decoupling mechani...

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Abstract

The invention discloses a two-degree-of-freedom micro-nano positioning platform, which includes a base, a motion platform, a guide mechanism, a decoupling mechanism, and a driver; the motion platform is provided in the middle of the base, and the guide is connected around the motion platform mechanism, the guiding mechanism is connected with the decoupling mechanism, the decoupling mechanism is connected with the base, the amplifying mechanism is placed between the motion platform and the decoupling mechanism, the amplifying mechanism is connected with the decoupling mechanism, A driver is arranged in the amplifying mechanism, and the driver is used to drive the moving platform. The structural layout of the invention effectively utilizes the space of the positioning platform and reduces the overall size of the positioning platform. The invention can reduce the force-displacement non-linearity caused by the stiffening effect of the hinge of the positioning platform and reduce the concentrated stress of the hinge. The driver auxiliary assembly mechanism makes it more convenient for the driver to be interference-fitted into the amplification mechanism, and the positioning platform can use wire cutting Integrated processing has the advantages of no assembly, no friction, no lubrication, etc.

Description

technical field [0001] The invention relates to the field of micro-nano precise positioning, in particular to a two-degree-of-freedom micro-nano positioning platform. Background technique [0002] Micro-nano positioning technology has been widely used in many fields such as microelectronics engineering, precision and ultra-precision machining, biomedical engineering, and precision optical engineering. The higher performance requirements are coming; the micro-nano positioning platform is the most important basic component in the micro-nano positioning system, and the rationality of its structural design determines the performance of the positioning system. Therefore, it is of great significance to develop micro-nano positioning platforms with new configurations and excellent performance. [0003] In some occasions that require a large working stroke, a displacement amplification mechanism is usually designed and installed in the micro-nano positioning platform to amplify the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G12B5/00
CPCG12B5/00
Inventor 纪华伟李天翼
Owner HANGZHOU DIANZI UNIV
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