Visual detection device for macro-and-micro-motion platforms and method

A visual detection device and technology of a motion platform, which is applied in the field of visual detection devices for macro and micro motion platforms, can solve problems such as limiting the range of motion of the motion platform, easily running out of the field of vision, and detection failures, so as to achieve no increase in additional quality of the structure, Strong scalability and low cost

Active Publication Date: 2019-01-18
SHANDONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The small field of view causes the observed object to easily run out of the field of view, resulting in detection failure, which severely limits the movement range of the motion platform

Method used

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  • Visual detection device for macro-and-micro-motion platforms and method
  • Visual detection device for macro-and-micro-motion platforms and method
  • Visual detection device for macro-and-micro-motion platforms and method

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[0041] It should be pointed out that the following detailed description is exemplary and intended to provide further explanation to the present application. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

[0042] It should be noted that the terminology used here is only for describing specific implementations, and is not intended to limit the exemplary implementations according to the present application. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural, and it should also be understood that when the terms "comprising" and / or "comprising" are used in this specification, they mean There are features, steps, operations, means, components and / or combinations thereof.

[0043] As introduced in the background technology, there are deficiencies in the prior art that cannot satisfy t...

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Abstract

The invention discloses a visual detection device for macro-and-micro-motion platforms and a method. The device solves the problem that high-precision detection and large-travel detection of macro-and-micro-motion platforms cannot be simultaneously met in the prior art, and can enable a micro-motion platform to be always in the field-of-view of a microscope through setting an adjustment platform,and improve detection accuracy. A technical solution of the device includes an air floating platform used as supporting. The macro-and-micro-motion platforms are installed above the air floating platform through the adjustment platform. The microscope provided with a CCD camera is fixed at one side of the adjustment platform. An objective lens of the microscope corresponds to an upper side of themacro-and-micro-motion platforms. Compensation for motion of a macro-motion platform is carried out through controlling motion of the adjustment platform, and the micro-motion platform is enabled to be always located in the field-of-view of the microscope.

Description

technical field [0001] The invention relates to the technical field of precision positioning, in particular to a visual detection device and method for macro and micro motion platforms. Background technique [0002] The macro and micro motion platform is an effective means to achieve large stroke and high precision. However, to achieve high-precision motion control, high-precision feedback is required. Conventional detection methods, such as grating rulers, are difficult to achieve high-precision detection in a large stroke range due to the limitation of sensor bandwidth, and there is an irreconcilable contradiction between stroke and accuracy. Although laser interferometers can achieve large strokes and high-precision measurements, they are expensive, difficult to meet general engineering needs, and are easily affected by the external environment. For example, when vibration occurs, the deflection of the beam affects the measurement accuracy. [0003] Vision technology h...

Claims

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Application Information

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IPC IPC(8): G01N21/84
CPCG01N21/84
Inventor 闫鹏张庆怡
Owner SHANDONG UNIV
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