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Optical component surface defect detection method based on spectral estimation and electron spectroscopic technology

A technology for optical components and defects, applied in the field of surface defect detection of optical components, can solve the problems of neglecting detection efficiency, high cost, and concealment of details of optical components, so as to reduce costs, use high efficiency, and improve defect detection accuracy. Effect

Active Publication Date: 2022-03-08
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] The purpose of the present invention is to address the above-mentioned deficiencies in the prior art, in order to solve the problem that the detailed information of the surface defect of the optical element is covered or ignored when the surface scattered light of different wavelengths is superimposed on each other when white light is used for illumination, and the detection efficiency in the physical spectroscopic method In view of the shortcomings of low cost and high cost, a detection method for surface defects of optical components based on spectral estimation and electronic spectroscopic technology is proposed

Method used

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  • Optical component surface defect detection method based on spectral estimation and electron spectroscopic technology
  • Optical component surface defect detection method based on spectral estimation and electron spectroscopic technology
  • Optical component surface defect detection method based on spectral estimation and electron spectroscopic technology

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Embodiment

[0077] The discretization of the reflection spectrum r of the embodiment is expressed as a matrix, and is discretized according to the wavelength interval of 5nm:

[0078] v=[v r v g v b ] T =Ar=A[r(λ 1 ) r(λ 2 )...r(λ n )] T

[0079] =A[r(400) r(405)...r(700)] T

[0080] Among them, A represents the system matrix, which represents the characteristics of the entire detection system.

[0081] The specific program implementation process is as follows: figure 1 as shown ( figure 1 Using V and R to construct G is step 1 (1), using F and G to construct M and calculating the filtered image is step 2 (2)),

[0082] Wherein the color defect image is obtained by using a color camera CCD to shoot the surface of the optical element; the color block matrix V is constructed by a standard color card value, and the embodiment adopts a 24-color color card, and V is a matrix of 3x24 dimensions (3 is three components of RGB) ;Aiming at 24 color cards, each color has a different r...

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Abstract

A detection method for surface defects of optical components based on spectral estimation and electronic spectroscopy technology. The invention obtains single-wavelength spectral images and color spectral images of defect images through spectral estimation and electronic spectral technology, and optimizes the defect spectral images Process and automatically select the best spectroscopic images. Compared with the prior art, the present invention solves the problem of concealment of defect information caused by superposition of different wavelengths during white light illumination in the prior art, and solves the problem of physical spectroscopic detection by using spectral technology to select a suitable detection wavelength to identify defects. The problem of cost and efficiency improves the efficiency and accuracy of defect detection and reduces the cost of defect detection.

Description

technical field [0001] The invention relates to detection of surface defects of optical components, in particular to a method for detection of surface defects of optical components based on spectrum estimation and electronic spectroscopic technology. Background technique [0002] After the optical components are precision polished, there are still defects such as pitting, scratches, broken points, and open air bubbles on the surface of the components. In a precision optical system, surface imperfections of optical components cause diffraction and generate noise spots, which reduces the accuracy of the system. At the same time, surface defects can also absorb light energy, generate thermal stress, and damage the surface of optical components and even the entire optical system. Therefore, the detection of surface defects of optical components is a prerequisite for the application of precision optical components. [0003] At present, the surface defect detection methods of op...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06T7/00G06T7/13G01N21/88G06T5/00
CPCG06T7/0004G06T7/13G01N21/8851G01N2021/8887G06T2207/30164G06T2207/30168G06T2207/10024G06T2207/10061G06T5/70
Inventor 杨言若步扬徐静浩王少卿王向朝
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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