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Double base disk involute sample measurement system based on laser heterodyne interferometry

A technology of laser heterodyne interferometry and measurement system, which is applied in the field of double-base disc involute sample measurement optical system, can solve the problems of unrealistic and inability to guarantee the accuracy of the verification method, and achieve the effect of achieving measurement accuracy

Active Publication Date: 2020-03-13
BEIJING UNIV OF TECH
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Problems solved by technology

Using the double-base disc-type involute model as the standard measuring tool for the involute gear measuring instrument, if the verification method and the accuracy of the double-base disc-type involute model cannot be guaranteed, it is necessary to fundamentally improve the accuracy of the gear measuring instrument. Unrealistic

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  • Double base disk involute sample measurement system based on laser heterodyne interferometry
  • Double base disk involute sample measurement system based on laser heterodyne interferometry

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Embodiment Construction

[0018] figure 1 The structure of the double base disc involute model is given in , figure 2 A complete basic optical path diagram for high-precision measurement of a double-base disc-type involute model based on straight-reflection three-path laser heterodyne interference is given in . Its specific implementation process is as follows:

[0019] Such as figure 2 As shown in Fig. 1, a high-precision measurement optical system based on a double-base disc involute model based on straight-reflection three-path laser heterodyne interferometry is built. Let the output frequency of the frequency-stabilized laser be f 1 and f 2 , two beams of linearly polarized light perpendicular to each other whose vibration directions are parallel to the incident surface and the vertical incident surface respectively, are detected by BS 1 The reflected light via P 1 After forming the interference signal by PD 1 received and converted to a reference signal I r ;by BS 1 The transmitted ligh...

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Abstract

The invention discloses a double-base disc type involute template measuring system based on laser heterodyne interference. The double-base disc type involute template measuring system comprises a frequency stabilized laser, a polarization analyzer namely P1, a photoelectric detector namely PD1, a spectroscope 1 namely BS1, a spectroscope 2 namely BS2, a spectroscope 3 namely BS3, a reflector namely M4, a cylindrical prism 1 namely L1, a cylindrical prism 2 namely L2, a cylindrical prism 3 namely L3, a measuring light path system 1, a measurement optical path system 2, a measuring light path system 3, a double-base disc type involute template shaft, a cylinder base 1, a cylinder base 2 and an involute tooth surface. A double-base disc type involute template is composed of an involute toothsurface area and the two base cylinders which correspond to the base circle of the involute tooth surface. The two base cylinders are separately installed on both sides of the involute tooth surface area. The center parts of the base cylinders are polished, and the radius of the unpolished surfaces of the base cylinders is equal to that of the base circle. The double-base disc type involute template measuring system applies the laser heterodyne interference technology into the measurement of the double-base disc type involute template to realize the high-resolution and dynamic real-time measurement.

Description

technical field [0001] The invention relates to an optical system for measuring an involute sample, in particular to a double-base disc-type involute sample measuring optical system based on straight-reflection three-light-path laser heterodyne interference. Background technique [0002] As one of the most widely used basic components, gears are the key basic components of high-end manufacturing equipment and an indispensable part of the application of modern engineering technology in my country, playing an important role in construction. With the continuous improvement of key equipment requirements for gear use and the rapid improvement of gear processing technology, the accuracy of gears has been greatly improved. In order to realize the precision control of gears, it is very important to ensure the measurement accuracy of high-precision gear measuring instruments. Each index of the gear measuring instrument must be calibrated before measuring the gear. After each individ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00
CPCG01B11/00
Inventor 陈洪芳姜博石照耀李宝山汤亮
Owner BEIJING UNIV OF TECH
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