Infrared detection device and method for C4F7N concentration and discharging micro components
An infrared detection device and a technology for trace components, which are applied in the field of gas infrared spectroscopy, can solve problems such as comprehensive performance gaps and cannot be completely replaced, and achieve the effects of high precision, accurate qualitative analysis of components, and high detection precision.
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[0045] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0046] Such as figure 1 shown, a C 4 f 7 The infrared detection device of N concentration and discharge trace component comprises: Fourier transform infrared spectrometer 16 and waste gas bottle 28, waste bottle 28 is connected with vacuum pump 22, and vacuum pump 22 is connected with second switch valve 21, and second switch valve 21 is away from One end of vacuum pump 22 is connected with Fourier transform infrared spectrometer 16, and the other end of Fourier ...
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