Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Positive pressure leak hole calibration system and method with lower limit of 10<-10>Pam<3>/s

A calibration system and positive pressure leak technology, which is applied in the testing of machine/structural components, fluid tightness testing, and detection of fluid appearance at the leak point, etc., can solve the problems that cannot meet the calibration requirements of positive pressure leaks, etc. , to achieve the effect of solving calibration technical problems and technical bottlenecks

Inactive Publication Date: 2018-12-11
BEIJING DONGFANG MEASUREMENT & TEST INST
View PDF5 Cites 3 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The lower calibration limits of the four devices mentioned above are all higher than 1×10 -8 Pam 3 / s, cannot meet the small leak rate (leakage rate is less than 1×10 -8 Pam 3 / s) Calibration requirements for positive pressure leaks

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Positive pressure leak hole calibration system and method with lower limit of 10&lt;-10&gt;Pam&lt;3&gt;/s
  • Positive pressure leak hole calibration system and method with lower limit of 10&lt;-10&gt;Pam&lt;3&gt;/s
  • Positive pressure leak hole calibration system and method with lower limit of 10&lt;-10&gt;Pam&lt;3&gt;/s

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] (1) Keep the ambient temperature at 23±1°C, use high-purity N 2 Gas (both with a purity of 99.999%) washes the vacuum system 3 times; after that, through the valve V 5 Charge 101.32kPa of N to the Leak outlet of the calibrated leak 2 Gas (99.999% pure) is used to simulate the ground atmospheric pressure state at the leak outlet.

[0041] (2) Set the temperature of the incubator to 23±0.05°C, close the valve V 7 The gas leaked from the leak hole is accumulated in the accumulation chamber (Leak and V 7 Between the metal seal structure, the volume is V s =0.98mL), after accumulating the leaked gas for 36000s, the accumulative indoor gas pressure is 218Pa(P s =218Pa), open the valve V 7 Expand the mixed gas in the accumulation chamber to VC 1 Decaying pressure in the volume composed of its related pipes, after waiting for 100s, close the valve V 9 , open the valve V 8 , the mixed gas is introduced into the mass spectrometry chamber VC through the molecular flow samp...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a positive pressure leak hole calibration system and method with a lower limit of 10<-10>Pam<3> / s. The system comprises a molecular pump pumping system, a high-purity helium cylinder, a high-purity nitrogen cylinder, a gas sampling valve (V4), ten vacuum valves (V1, V2, V3, V5, V6, V7, V8, V9, V10, V11), three vacuum chambers (VC1, VC2, VC3), three vacuum gauges (G1, G2, G3), a quadrupole mass spectrometer (G4), a molecule flow sample inlet element (C), a getter pump (NEG), a calibrated positive pressure leak hole and a constant temperature cabinet.

Description

technical field [0001] The invention belongs to the technical field of vacuum measurement, specifically a kind of vacuum measurement with a lower limit of 10 -10 Pam 3 / s positive pressure leak calibration system and method. Background technique [0002] Positive pressure leak inlets are devices that provide a steady flow of gas to atmosphere. Positive pressure leaks with a leak rate of less than 10-8Pam3 / s are widely used in leak detection and calibration of high-reliability and long-life electronic components. In order to ensure that the leak rate of vacuum electronic devices to the atmosphere meets product quality requirements, it is necessary to The positive pressure leak of the reference leak rate is regularly calibrated to ensure the correctness of the calibrated leak rate of vacuum electronic devices. The document "Two dynamic comparison methods for calibrating the rate of pressure leaks", "Vacuum", Volume 53, No. 1-2, Page 187-191, 1999, proposed a positive pressu...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01M3/20
CPCG01M3/202G01M3/207
Inventor 卢耀文刘志宏齐京杨传森田虎林董云宁闫睿延峰
Owner BEIJING DONGFANG MEASUREMENT & TEST INST
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com