Pull rod structure used for reaction cavity

Abstract

The invention discloses a pull rod structure used for a reaction cavity. The pull rod structure comprises a pull rod, a corrugated pipe and a driving unit, one end of the pull rod is located in the reaction cavity, the other end of the pull rod is located outside the reaction cavity, the corrugated pipe is arranged at the end, located outside the reaction cavity, of the pull rod in a sleeving manner, the second end of the corrugated pipe is in sealed connection with the reaction cavity, the first end of the corrugated pipe is provided with a sealing sleeve, the sealing sleeve is arranged on the pull rod in a sleeving manner, and an annular sealing cavity is arranged between the sealing sleeve and the pull rod; the position, located in the annular sealing cavity, on the pull rod is sequentially sleeved with a first sealing ring, a first sealing pressure pad, a second sealing ring and a second sealing pressure pad, the second sealing pressure pad is close to the outer side of the sealingsleeve, and the outer sides of the pull rod and the sealing sleeve are provided with compression pieces used for compressing the second sealing pressure pad; and a driving unit is connected with thesealing sleeve and drives the sealing sleeve to drive the pull rod to do reciprocated linear motion relative to the reaction cavity. According to the pull rod structure, sealing of the pull rod is changed from sliding sealing in the prior art into static sealing of the first sealing ring and the second sealing ring, the sealing effect is good, abrasion to the sealing rings is small, and stabilityand reliability are achieved.

Description

technical field [0001] The invention relates to liquid phase epitaxial growth equipment, in particular to a tie rod structure used in a reaction chamber. Background technique [0002] For liquid phase epitaxial growth equipment, the precise control of the atmosphere, pressure, temperature and other factors in the reaction chamber is the key to ensure the quality of the process. Therefore, higher requirements are put forward for the sealing performance during the movement of the pull rod. The traditional tie rod motion sealing structure adopts sliding seal, which uses a pressing block to compress the O-ring, and the tie rod moves axially relative to the O-ring. In this sealing method, on the one hand, the friction between the tie rod and the O-ring during the movement can easily cause the movement of the tie rod to get stuck and vibrate, resulting in the deterioration of the film morphology after epitaxy and the failure of the epitaxy process; on the other hand , After long...

AI Technical Summary

Problems solved by technology

In this sealing method, on the one hand, the friction between the tie rod and the O-ring during the movement can easily cause the movement of the tie rod to get stuck and vibrate, resulting in the deterioration of the film morphology after epitaxy and the failure of the epitaxy process; on the other hand , after a long time of use, it is easy to wear and age the O-ring and reduce the sealing performance of the O-ring, that is, the sealing of the reaction chamber cannot be guaranteed, which is not good for safety and production process

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