Semiconductor characteristic parameter comprehensive testing equipment
A technology of characteristic parameters and comprehensive testing, applied in the comprehensive characterization of semiconductor optical, magnetic and their mutual coupling properties, and electrical fields, it can solve problems such as unseen equipment, and achieve the effect of expanding modes and capabilities.
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[0017] A comprehensive testing device for semiconductor characteristic parameters, which has independent optical, electrical and magnetic testing functions. The testing device includes a light source 100, an optical detection system (not shown in the drawings), an electrical system (not shown in the drawings), a magnetic Optical system (not marked in the drawings) and control system 121, the optical detection system, electrical system, magnetic system can be connected to the control system 121 through the communication interface, the optical detection system, electrical system, magnetic system any Switching between the two can be realized through the control system 121 . The opto-electromagnetic test modules can be combined at will, and the coupling test can be modulated with each other; normal temperature or variable temperature test can be carried out.
[0018] In this embodiment, the magnetic system adopts a bipolar magnet 105, and the magnetic field strength is adjustable....
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