A two-stroke hybrid-drive micro-nano indentation/scratch testing device

Abstract

The invention relates to a two-stroke hybrid-drive micro-nano indentation / scratch testing device, belonging to the technical field of precision sensors and precision instruments. The device includes ahybrid drive unit, a load detection and range changing unit, a displacement detection unit, a sample moving unit, a base, a support plate and a guide rail-sliding block assembly. Hybrid driving is achieved by utilizing a voice coil motor and a piezoelectric stack-flexible hinge. Through adjusting a fitting relationship between a shielding case (rack) and a force sensor, and through adopting segmented load detection and range changing, different loading strokes and precise measurement of indentation load can be achieved by combination with the displacement detection unit, and the sample movingunit is integrated to achieve sample indentation position changing and scratch testing. A modular design concept is adopted, and the device is compact in structure, safe, reliable, capable of achieving conventional nano indentation / scratch testing for mass metal materials, film materials, composite materials, and the like, capable of performing large-stroke loading tests for soft materials such as biological tissues, and high in practicability.

Description

technical field [0001] The invention relates to the technical field of precision sensors and precision instruments, in particular to a dual-stroke hybrid driving micro-nano indentation / scratch testing device. The present invention can realize two kinds of high-precision micro-nano indentation / scratch tests with different strokes at the same time, and has very important scientific significance and broad application prospects in the fields of semiconductor technology, advanced materials and material science, aerospace and national defense science and industry, etc. . Background technique [0002] In recent years, with the continuous improvement of the synthesis and preparation process of new materials, their feature sizes have become smaller and smaller. When using traditional standard tests to measure their mechanical parameters, a series of problems such as clamping and alignment may occur. For this reason, in view of the traditional macro hardness and scratch test, a micro...

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Problems solved by technology

[0005] The purpose of the present invention is to provide a dual-stroke hybrid drive micro-nano indentation / scratch test device, which solves the problem that the existing micro-nano indentation / scratch test device cannot simultaneously realize high-precision and large-stroke loading modes and corresponding detection Technology and other defects, can realize two different strokes at the same time with high precision

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