Active control method for minimal displacement of magnetic suspension molecular pump rotor

Abstract

The invention relates to an active control method for minimal displacement of a magnetic suspension molecular pump rotor. A mathematical model of a generalized controlled object of a magnetic suspension rotor system is established by analyzing a formation mechanism of unbalanced vibration of the magnetic suspension rotor system. Channel controllers are designed based on the principle of linear auto disturbance rejection control. The unbalanced vibration of the system is regarded as an external disturbance, the disturbance is estimated and compensated in real time by using a linear extended state observer, and so same frequency compensation signals with appropriate amplitude and phase are superimposed on a control signal to offset rotor unbalanced exciting force to realize high speed and high precision rotation of the rotor around a geometric axis, thereby realizing the active control of the minimal displacement of the magnetic suspension rotor system. Compared with a conventional control method, the active control method has advantages of simple parameter adjustment, easy implement, small rotor whirl radius and high rotation precision, can greatly reduce rotation speed same frequency components in a displacement signal, and is of great significance for improving the performance and reliability of the magnetic suspension rotor system.

Description

technical field [0001] The invention relates to an active vibration control method for extremely small displacement of a magnetic levitation molecular pump rotor, which can be applied to high-precision and strong robust control of a high-speed magnetic levitation rotor system, and belongs to the field of motion control. Background technique [0002] The magnetic levitation molecular pump is an important equipment for obtaining high vacuum, and is widely used in various high vacuum occasions. Compared with traditional mechanical bearings, magnetic suspension bearings, as a new type of bearings, have a wide range of applications because of their special advantages such as non-contact, frictionless, high speed, high precision, long life, and active control of rotor dynamic imbalance. prospect. Since the control accuracy of the magnetic levitation rotor system is an important factor that determines whether the molecular pump can run stably and reliably at high speed for a long ...

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to propose an active control method for the minimum displacement of the rotor based on the linear active disturbance rejection controller, aiming at the problem that the rotor system of the magnetic levitation molecular pump is affected by the unbalanced vibration and the displacement accuracy is reduced.

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