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Mask plate and fabrication method thereof

A manufacturing method and a technology of a mask plate, which are applied in the manufacture of semiconductor/solid-state devices, ion implantation plating, coating, etc., can solve the problem of high-precision fine mask plate evaporation surface engraving and the influence of high-precision fine mask plate tensioning Performance and service life and other issues, to achieve better tensile performance, improve the PPI of evaporation, and improve the service life

Active Publication Date: 2018-06-12
TRULY HUIZHOU SMART DISPLAY
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  • Claims
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Problems solved by technology

The thickness of the existing high-precision fine mask is more than 30 μm. When making a high-PPI (PPI greater than 400) high-precision fine mask, it is necessary to etch more pattern openings on the mask, and the pattern openings are denser. , the distance between the pattern openings is even smaller. If the existing high-precision fine mask is used, the evaporation surface of the high-precision fine mask will be cut through, so that the adjacent pixel openings will be penetrated, thereby affecting the high precision. Fine Mask Tensile Performance and Subsequent Service Life

Method used

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  • Mask plate and fabrication method thereof
  • Mask plate and fabrication method thereof

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Embodiment Construction

[0034] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the associated drawings. Preferred embodiments of the invention are shown in the accompanying drawings. However, the present invention can be embodied in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0035] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field of the invention. The terms used herein are for the purpose of describing specific embodiments only, and are not intended to limit the present invention. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0036] For example...

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Abstract

The invention relates to a mask plate and a fabrication method thereof. The method comprises the steps that a mask plate raw material is provided; one side of the mask plate raw material is etched sothat the thickness of the mask plate raw material can be reduced; the etched side of the mask plate raw material is subjected to smooth polishing treatment; the smoothly polished mask plate raw material is etched, pixel openings are etched in the mask plate raw material, and the mask plate with the pixel openings is formed. Firstly, through etching, the thickness of the mask plate raw material isreduced, after the mask plate is subjected to smooth polishing treatment, the mask plate with a smaller pixel opening interval can be etched out of the mask plate raw material, and thus the vapor deposition PPI of the mask plate is improved; and it is effectively avoided that the mask plate is etched through, the structure of the mask plate can be more steady, the tensile performance of the mask plate can be better, and the service life of the mask plate is effectively prolonged.

Description

technical field [0001] The invention relates to the technical field of organic light-emitting display manufacturing, in particular to a mask plate and a manufacturing method thereof. Background technique [0002] In the AMOLED (Active-matrix organic light emitting diode, active matrix organic light emitting diode) production process, the evaporation process is the most influential factor in the yield rate. The basic process of the evaporation process is to heat the organic material to evaporate the organic material. And the through hole etched through the high-precision fine mask plate and the manufacturing method thereof is vapor-deposited on the glass substrate to form a light-emitting unit. [0003] PPI (pixels per inch, the number of pixels per inch) is the unit of image resolution, indicating the number of pixels per inch. Therefore, the higher the PPI value, it means that the display screen can display images with higher density. Of course, the higher the density dis...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04H01L51/56
CPCC23C14/042H10K71/166H10K71/00
Inventor 龚建国王衣可杨颖冉应刚吴俊雄柯贤军苏君海李建华
Owner TRULY HUIZHOU SMART DISPLAY
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