Gas concentration detection device and gas concentration detection method

Abstract

The invention relates to a gas concentration detection device and a gas concentration detection method, comprising a vacuum detection chamber, a gas concentration detection sensor, a vacuum sampling element and a detection analyzer; the sampling element is connected to the detection chamber, and the detection chamber is connected to an external storage The sealed chamber of the gas to be detected is connected, the gas concentration detection sensor is arranged in the detection chamber, and the detection analyzer is respectively connected with the gas concentration detection sensor and the sampling element. The above-mentioned gas concentration detection device detects the gas concentration through the gas concentration detection sensor and the vacuum detection chamber, and can obtain real-time and accurate detection results. The gas in the sealed chamber is sampled through the sampling element, and analyzed by the detection analyzer to obtain More accurate detection results, and by comparing the two concentration detection results with the detection analyzer, it is judged whether the sensor is faulty, thereby avoiding the wrong concentration information obtained due to sensor faults, and making the detection results more accurate.

Description

technical field [0001] The present application relates to the detection field, in particular to a gas concentration detection device and a gas concentration detection method. Background technique [0002] With the development of electronic technology, the requirements for the packaging process of electronic devices are becoming more and more stringent. When there is a "hydrogen effect" in the packaging process, it will change the performance of the device, cause the device to work abnormally, and cause the device to fail. shorten the service life of the device. In order to solve the problem of the hydrogen effect of the device, it is necessary to quickly evaluate the ability of the device to resist "hydrogen poisoning". This requires accelerating the hydrogen effect of the device in high-temperature, high-pressure hydrogen gas, so we need to accurately control the hydrogen concentration in the high-temperature, high-pressure chamber, and need to detect the hydrogen concentr...

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Problems solved by technology

[0004] Based on this, it is necessary to provide an accurate gas concentration detection device and a gas concentration detection method for the problem that it is difficult to judge whether the gas concentration itself has changed or the gas concentration detection sensor has failed, and the accurate gas concentration detection result cannot be obtained.

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