A segmented double-film electrothermally actuated mems switch with a compliant mechanism
A technology of electrothermal drive and compliant mechanism, applied in thermal switch parts and other directions, can solve the problems of unfavorable device life and stability, high power consumption of electromagnetic drive, high electrostatic voltage, shorten the production cycle, fast recovery effect, response fast time effect
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[0027] To further illustrate the various embodiments, the present invention is provided with accompanying drawings. These drawings are a part of the disclosure of the present invention, which are mainly used to illustrate the embodiments, and can be combined with related descriptions in the specification to explain the operating principles of the embodiments. With reference to these contents, those skilled in the art should understand other possible implementations and advantages of the present invention. Components in the figures are not drawn to scale, and similar component symbols are generally used to denote similar components.
[0028] The present invention will be further described in conjunction with the accompanying drawings and specific embodiments.
[0029] like figure 1 As shown, a segmented double-layer membrane electrothermally driven MEMS switch with a compliant mechanism includes: a first static contact point 1, a substrate 2, an arc-shaped electric contact ma...
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