A sample conveying system applied to a vacuum interconnection system

Abstract

The invention discloses a sample transmission system applied to a vacuum interconnection system, which includes a vacuum pipeline; at least two sample holders and two vacuum lifting platforms corresponding to the at least two sample holders; at least one fully mechanically driven manipulator, the fully mechanically The driving manipulator is at least used to transfer the sample between the sample holder and the sample holder, and to drive the upper and lower sides of the sample; at least one sample manipulator is used to at least take the sample in the sample holder to the corresponding device; at least two Two vacuum magnetic rods are used to drive the fully mechanically driven manipulator and the spoon-shaped sample manipulator respectively. The full mechanical movement in the vacuum is used to realize the transfer of the sample from one sample holder to another sample holder or equipment, as well as the flipping of the upper and lower sides of the sample. The sample transfer process is not driven by electric or pneumatic servo in the vacuum, and the vacuum degree of the whole system is not affected. , cleanliness, and can adapt to the local high temperature working conditions and space dimensions in the vacuum interconnection system.

Description

technical field [0001] The invention relates to the field of vacuum machinery, in particular to a sample transmission system applied to a vacuum interconnection system. Background technique [0002] Since the artificial vacuum on the earth can achieve a local ultra-clean environment, it is of great significance to the growth, preparation and scientific research of specific materials, such as semiconductor wafer growth, semiconductor device preparation, electron scanning microscope detection of objects, transmission electron microscope The detection of the interface of the material, etc., is carried out in an artificial vacuum environment. In order to make better use of the high-cleanliness characteristics of the vacuum to continuously study material growth, device preparation, and performance testing, the above-mentioned process can be completed by using the vacuum interconnection system, so that the research sample itself does not have to be exposed to Introduce pollution ...

AI Technical Summary

Problems solved by technology

[0004] For the above-mentioned vacuum interconnection system, it is necessary to solve the problem of exchanging the sample parking platform of each equipment on the vacuum pipeline with the sample exchange platform of the sample transfer trolley in the vacuum interconnection pipeline. Individual samples need to be turned upside down, but it cannot affect the vacuum degree, cleanliness, and locality of the entire system. The basic solution to the problem of high-temperature working conditions and space size is to use purely mechanical movement, and not use any electric servo or pneumatic servo in vacuum to meet the vacuum degree, cleanliness, local high temperature and space size of the vacuum interconnection system.

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