Sample conveying system applied to vacuum interconnection system

Abstract

The invention discloses a sample conveying system applied to a vacuum interconnection system. The sample conveying system applied to the vacuum interconnection system comprises a vacuum pipeline, at least two sample supports, two vacuum lifting tables corresponding to the at least two sample supports, at least one full-mechanical drive manipulator, at least one sample manipulator, and at least twovacuum magnetic rods. The full-mechanical drive manipulator is at least used for conveying a sample between the sample supports and driving an upper surface and a lower surface of the sample to overturn; the sample manipulator is at least used for fetching and sending the sample in the sample support to a corresponding device; and the two vacuum magnetic rods are used for driving the full-mechanical drive manipulator and the spoon-shaped sample manipulator. By adopting full-mechanical movement in vacuum, the sample is conveyed from one sample support to the other sample support or the device,and the upper surface and the lower surface of the sample are overturned; and in vacuum, an electric or pneumatic servo drive sample conveying process is not adopted, so that a vacuum degree and thecleanliness of the whole system are not influenced, and the sample conveying system applied to the vacuum interconnection system can adapt to a local high temperature working condition and a space dimension in the vacuum interconnection system.

Description

technical field [0001] The invention relates to the field of vacuum machinery, in particular to a sample transmission system applied to a vacuum interconnection system. technical background [0002] Since the artificial vacuum on the earth can achieve a local ultra-clean environment, it is of great significance to the growth, preparation and scientific research of specific materials, such as semiconductor wafer growth, semiconductor device preparation, electron scanning microscope detection of objects, transmission electron microscope The detection of the interface of the material, etc., is carried out in an artificial vacuum environment. In order to make better use of the high-cleanliness characteristics of the vacuum to continuously study material growth, device preparation, and performance testing, the above-mentioned process can be completed by using the vacuum interconnection system, so that the research sample itself does not have to be exposed to Introduce pollution ...

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Problems solved by technology

[0004] For the above-mentioned vacuum interconnection system, it is necessary to solve the problem of exchanging the sample parking platform of each equipment on the vacuum pipeline with the sample exchange platform of the sample transfer trolley in the vacuum interconnection pipeline. Individual samples need to be turned upside down, but it cannot affect the vacuum degree, cleanliness, and locality of the entire system. The basic solution to the problem of high-temperature working conditions and space size is to use purely mechanical movement, and not use any electric servo or pneumatic servo in vacuum to meet the vacuum degree, cleanliness, local high temperature and space size of the vacuum interconnection system.

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