A Dynamic Modeling Method for Detection of Aspheric Surfaces Using Axial Scanning Optical Interferometry

A dynamic modeling, aspheric technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of deviation between simulation and real experiments, difficult to obtain the optical path to the detector, etc.

Active Publication Date: 2020-01-24
NANJING UNIV OF SCI & TECH
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Problems solved by technology

Usually, when zemax software is used to establish the dynamic simulation model of aspheric surface detection by axial scanning light interferometry, due to the influence of the distortion effect of the interferometer lens, it is difficult to obtain the optical path to a specific pixel of the detector, resulting in a discrepancy between the simulation and the real experiment. large deviation

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  • A Dynamic Modeling Method for Detection of Aspheric Surfaces Using Axial Scanning Optical Interferometry
  • A Dynamic Modeling Method for Detection of Aspheric Surfaces Using Axial Scanning Optical Interferometry

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Embodiment Construction

[0029] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0030] to combine figure 1 and figure 2 , a dynamic modeling method for detecting an aspheric surface using axial scanning light interferometry, the method steps are as follows:

[0031] Step 1. Build the interferometer model:

[0032] Use zemax software to build an interferometer model, the wavelength of the laser light source used is 632.8nm, and the interferometer model includes a polarizer 1, a light source beam expander 2, a polarizing beam splitter 3, a quarter-wave plate 4, and a collimator lens group 5 , standard spherical lens group 6, aspheric mirror to be tested 7, pinhole diaphragm 8, imaging lens group 9 and CCD10; the common optical axis is arranged in sequence CCD10, imaging lens group 9, pinhole diaphragm 8, polarizing beam splitter 3, four One-third wave plate 4, collimating lens group 5, standard spherical lens group 6 and to-be-measured...

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Abstract

The invention discloses a dynamic modeling method for detecting an aspheric surface through an axial scanning optical interference method, and the method comprises the steps: building an interferometer model through zemax software; simulating a process of driving a to-be-detected aspheric mirror to axially move in the interferometer model through matlab software; carrying out the tracking, fittingand reverse tracking of light, thereby eliminating impact on the light tracking effect from lens distortion; finally building an objective image relation between the to-be-detected aspheric mirror and a CCD image element, thereby obtaining a series of interferograms which continuously change with the scanning, and improving the simulation scientificity.

Description

technical field [0001] The invention belongs to the field of surface shape detection, and in particular relates to a dynamic modeling method for detecting an aspheric surface by using an axial scanning light interference method. Background technique [0002] The advancement of modern technology has also promoted the development of optical technology, and aspheric surfaces are particularly prominent in the application of optical systems. Compared with the system composed of spherical optical elements, the aspheric system has greater advantages in correcting aberration, expanding the field of view, and simplifying the system structure. However, high-precision, high-quality aspheric processing and testing technology has always been the bottleneck restricting the further wide application of aspheric surfaces. To some extent, the key to realizing high-efficiency and high-precision processing of aspheric surfaces is whether to provide reliable and effective detection to guide pro...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02
CPCG01B9/02027
Inventor 马骏何庆浩谢建康石磊魏聪王磊刘炳琦巴图张天宇
Owner NANJING UNIV OF SCI & TECH
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