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Measurement clamp for X-CT (X ray-Computed Tomography) system

A measurement fixture and X-CT technology, which is applied to measurement devices, material analysis using radiation, material analysis using wave/particle radiation, etc., can solve problems such as inability to effectively fix tiny devices and large measurement deviations, and achieve reduction The effect of attenuation, reliable positioning, and accurate measurement results

Pending Publication Date: 2018-05-18
THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The purpose of the embodiment of the present invention is to provide a measurement fixture for X-CT system, aiming to solve the problem that the existing measurement fixture cannot effectively fix tiny devices and cause large measurement deviations

Method used

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  • Measurement clamp for X-CT (X ray-Computed Tomography) system
  • Measurement clamp for X-CT (X ray-Computed Tomography) system
  • Measurement clamp for X-CT (X ray-Computed Tomography) system

Examples

Experimental program
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Effect test

Embodiment 1

[0037] see Figure 1-Figure 5 , the center of rotation of the sample table 10 in this embodiment is provided with a threaded hole 12, and the bottom surface is provided with a positioning concave platform 11, wherein the cross-sectional structure of the positioning concave platform 11 is as follows Figure 5 As shown, this structure cooperates with the positioning points on the scanning turntable, so that the sample stage 10 can be precisely positioned on the scanning turntable, and this structure is the same as the existing fixture. Wherein the threaded hole 12 is used for connecting the slide column 20 .

[0038] The lower part of the slide column 20 is a stud 24 , which cooperates with the threaded hole 12 to tightly fix the slide column 20 on the sample stage 10 . Moreover, the rotation direction of the fastening slide column 20 is the same as the rotation direction of the scanning turntable during the test, so that the slide column 20 does not generate relative displacem...

Embodiment 2

[0054] In this embodiment, the middle part of the slide post 20 is a post 23, and the cross section of the post 23 is a closed figure surrounded by arcs and line segments. The shape of the transparent protective cover 30 is the same as that of the cylinder 23 , and the lower end of the transparent protective cover 30 is clamped on the cylinder in the middle of the slide column 20 through an interference fit from the upper end of the slide column 20 .

[0055] With the measuring jig of this embodiment, during the long-time scanning and rotating process, the positioning of the tiny device is reliable, and no relative displacement occurs with respect to the sample stage.

[0056] In summary, the measuring fixture for the X-CT system provided by the embodiment of the present invention is an effective supplement to the existing measuring fixture, and can be used for clamping and measuring micron-scale structures on tiny devices. The utility model has the advantages of simple struct...

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Abstract

The invention discloses a measurement clamp for an X-CT (X ray-Computed Tomography) system and belongs to the field of testing clamps. The measurement clamp comprises a sample platform, a sheet carrying column and an adhesive sheet, wherein a positioning concave platform matched with a scanning rotary platform is arranged on the bottom surface of the sample platform; the lower part of the sheet carrying column is fixedly connected with the sample platform; a rotary shaft of the sheet carrying column is parallel to a rotary shaft of the sample platform; the middle part of the sheet carrying column is a column body and the upper part of the sheet carrying column is a transparent thin plate which is arranged on the top surface of the column body and is integrated with the column body; the adhesive sheet is used for sticking a device to be detected and is arranged on the surface of the transparent thin plate. According to the technical scheme, phase displacement is not generated by the transparent thin plate relative to the sample platform, so that displacement is not generated on a tiny device; a measurement result is accurate and reliable; meanwhile, the attenuation on X rays is reduced by the transparent thin plate; a structure for highly accurately measuring the tiny device by utilizing X-CT is realized and the testing clamp appears in the field of the tiny device for the firsttime .

Description

technical field [0001] The invention belongs to the technical field of test fixtures, and in particular relates to a measuring fixture for an X-CT system, which is used for clamping and measuring the three-dimensional shape of a micron-scale structure of a semiconductor chip. Background technique [0002] X-CT (X-ray computed tomography, X-ray computerized tomography) technology is the use of physical technology, based on the determination of the attenuation coefficient of X-rays in the object, using mathematical methods, through computer processing, to solve the attenuation coefficient value in The two-dimensional distribution matrix on a section of an object is converted into the gray distribution on the image, thereby realizing the imaging technology of re-establishing the section image. [0003] X-CT technology is mostly used in medical imaging. X-CT can help doctors observe the patient's condition by establishing cross-sectional images of internal lesions in the human b...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/04
CPCG01N23/046
Inventor 荆晓冬梁法国郑世棋吴爱华翟玉卫王一帮刘晨乔玉娥
Owner THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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