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Vacuum cavity and preparation method thereof

A vacuum chamber and chamber wall technology, which is applied in the field of vacuum chamber and vacuum chamber preparation, can solve the problems of gas storage, dirt storage of supporting parts, etc., and achieve the effect of avoiding pollution and improving cleanliness

Active Publication Date: 2018-05-11
紫石能源有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a vacuum chamber and a preparation method of the vacuum chamber, which solves the problem of local dirt and gas accumulation in the supporting parts, and is easy to clean without polluting other parts

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  • Vacuum cavity and preparation method thereof
  • Vacuum cavity and preparation method thereof
  • Vacuum cavity and preparation method thereof

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Embodiment Construction

[0022] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings, in which the same or similar reference numerals indicate the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary, and are only used to explain the present invention, and cannot be construed as limiting the present invention.

[0023] The invention discloses a vacuum chamber, which has: a support 1 and a chamber wall 2. The support 1 is in the vacuum chamber, and the support 1 serves as a fixed support or positioning support for the assembly of other components, which requires the support 1 to have a certain shape and position tolerance.

[0024] A positioning surface 9 is formed on the chamber wall 2, and the bottom surface 4 of the support 1 is located on the positioning surface 9. The support 1 and the chamber wall 2 are conne...

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Abstract

The invention discloses a vacuum cavity and a preparation method thereof. The vacuum cavity is provided with a supporting part and a cavity wall, wherein a positioning surface is formed on the cavitywall, a concave clean area is formed in a bottom surface of the supporting part, the bottom surface is located on the positioning surface, the supporting part is connected to the cavity wall in a sealed mode, and a first threaded hole is formed in a top surface of the supporting part and communicates with the clean area. According to the vacuum cavity, the bottom surface and the positioning surface are connected in a sealed mode, so that no edge seam exists, dirt can can be prevented from being stored, in addition, the clean area is arranged on the bottom surface, the first threaded hole communicating with the clean area is formed in the top surface, so that air can smoothly escape and can be prevented from being stored, meanwhile, the clean area can be directly cleaned through the first threaded hole, and therefore the cleanliness in the vacuum cavity can be improved, and the pollution to parts can be avoided.

Description

Technical field [0001] The invention relates to a vacuum cavity and a preparation method of the vacuum cavity. Background technique [0002] At present, in the vacuum industry, vacuum system equipment has different requirements for the cleanliness of key parts of the equipment according to product requirements and working conditions. As a key part of the equipment, the vacuum chamber is the carrier of various execution parts, and it also provides a vacuum clean environment. [0003] The existing internal support parts of the vacuum chamber are mainly composed of cylindrical, rectangular or combined shape parts, which are directly welded to the chamber wall, and have a larger contact area with the chamber wall, and take into account the requirements of deflation , The welding between these parts and the chamber wall is intermittent welding. Such a structure forms a narrow semi-closed space between the two, which is easy to contain dirt and is difficult to remove, and is not conduc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23P15/00
CPCB23P15/00
Inventor 高少飞
Owner 紫石能源有限公司
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