Device and method for fast measuring of heat capacity of thin film material

Abstract

The invention discloses a device and method for fast measuring of heat capacity of a thin film material. In particular, the device includes a control device, a clock synchronizer, a flat peak laser device, a fast thermometer and a heat capacity output device; the control device is in signal connection with the clock synchronizer, and the clock synchronizer is in signal connection with the flat peak laser device and the fast thermometer; in a working state, the control device sends a starting signal to the clock synchronizer, the flat peak laser device and the fast thermometer are in coordinated interaction, and the flat peak laser device irradiates lasers having the energy space distribution of flat peaks to the sample surface; at the same time, the fast thermometer captures the surface temperature of a sample at a certain time point at the heating process of the sample, the test data are inputted into a heat capacity output device, and required heat capacity parameters are obtained. The device has simple structure, the method is high in efficiency and accurate, and reliable parameter data can be provided for setting of various thermophysical properties of ultra-thin semiconductorthin films.

Description

technical field [0001] The invention relates to the field of thermal measurement, more particularly to a device and method for quickly measuring the heat capacity of thin film materials. Background technique [0002] Thin-film materials are deposited on the substrate by physical or chemical means. Since the scale of the substrate in the thickness direction is usually hundreds of times or even thousands of times larger than the thickness of the film, it is difficult to measure the thermal properties of thin-film materials. [0003] Traditional heat capacity measurement techniques such as differential scanning calorimetry (DSC) and hot plate method can usually only be measured on a single block sample, and cannot be measured on a thin film sample with a substrate. [0004] Thermal grid method and delay method are newly developed new methods for measuring heat capacity of thin film materials using laser technology. The principle of the thermal grating method is to use a cohere...

AI Technical Summary

Problems solved by technology

[0005] Although the deposition technology of industrial thin films has been widely used, there are still a lot of difficulties in measuring the thermal properties of thin films deposited on the substrate surface, and there is still a lack of a new device and method for measuring the heat capacity of thin film materials in this field.

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