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Grapheme-based piezoresistive vacuum gauge and manufacturing method thereof

A graphene and piezoresistive technology, applied in the field of graphene-based piezoresistive vacuum gauge and its production, can solve the problems of low measurement sensitivity, large area and high cost of vacuum gauge, and achieve broad market application value and high cost. Prospect, low power loss, low cost effect

Pending Publication Date: 2018-03-06
TSINGHUA UNIV
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Problems solved by technology

[0004] The purpose of the present invention is to provide a piezoresistive vacuum gauge based on graphene and its manufacturing method, which solves the problems of low measurement sensitivity, large error, high cost, large floor space and large energy consumption of vacuum gauges in the prior art.

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  • Grapheme-based piezoresistive vacuum gauge and manufacturing method thereof
  • Grapheme-based piezoresistive vacuum gauge and manufacturing method thereof
  • Grapheme-based piezoresistive vacuum gauge and manufacturing method thereof

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Embodiment 1： pic 1，、、 3 1，，1 and and 1， pic 1 3 1， and 。 Embodiment 2： pic 2，。 Embodiment 3： pic 2，1， and 。 Embodiment 4

[0042] Such as figure 1 , figure 2 , image 3 and Figure 4 As shown, the graphene sensing element 1 is one or more arrays. Preferably, multiple graphene sheets are stacked vertically or staggered. Embodiment 1: as figure 1 Shown are divided into three graphene sensing elements 1 in the left, middle and right, wherein the graphene sensing element 1 in the middle overlaps with the graphene sensing elements 1 on its left and right sides, so figure 1 In the figure, three graphene sensing elements 1 are arranged in an array, and the graphene sheets have a structure of vertically aligned stacking and staggered stacking. Embodiment 2: as figure 2 As shown in , it is a structure in which graphene sheets are staggered and stacked. Embodiment 3: as figure 2 As shown, it is arranged in an array of a plurality of graphene sensing elements 1, and its graphene sheets have a structure of vertically aligned stacking and staggered stacking. Embodiment 4: as Figure 4 As shown, th...

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Abstract

The invention relates to the field of pressure sensors and discloses a grapheme-based piezoresistive vacuum gauge. The grapheme-based piezoresistive vacuum gauge comprises a plurality of graphene sensing elements including a plurality of stacked graphene sheets; a carrier including a flexible carrier coating the outer surfaces of the graphene sensing elements and in close contact with the graphenesensing elements; an electrode connected to the outer surface of the graphene sensing elements to form a circuit for monitoring current. The invention also discloses a method for manufacturing the grapheme-based piezoresistive vacuum gauge. The method comprises manufacturing the graphene sensing elements, connecting the electrode and packing the carrier. The graphene-based piezoresistive vacuum gauge measures the vacuum degree by using the graphene sensing elements, has high sensitivity, low cost, fast response speed, and small measurement errors, and has a broad market application value andprospect.

Description

technical field [0001] The invention relates to the field of pressure sensors, in particular to a graphene-based piezoresistive vacuum gauge and a manufacturing method thereof. Background technique [0002] Vacuum technology is a technology widely used in many industries and scientific research, such as semiconductor technology, surface engineering and space science, etc. Therefore, accurate measurement of vacuum pressure is essential for advanced research and production. Vacuum gauges commonly used by the industry include capacitive, thermal conductivity, and ionization. For capacitive direct measurement vacuum gauges, the pressure difference between vacuum and atmospheric environment can be measured very accurately, but its measurable vacuum range is limited to three to four orders of magnitude of the vacuum range (for example, 10 -3 -1, 1-1000, 10 -1 -100Torr), while it is difficult to measure below 10 -5 Torr pressure. In addition, the two most commonly used vacuum ...

Claims

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Application Information

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IPC IPC(8): G01L21/00
CPCG01L21/00
Inventor 任天令庞于靳馥华杨轶
Owner TSINGHUA UNIV
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