Single piezoelectric stack-based inertial nanometer stepping motor

A piezoelectric stack, stepper motor technology, applied in piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, generators/motors, etc., can solve the problem of increasing control difficulty, weak overall rigidity, etc. problems, to achieve the effect of improving rigidity and stepping accuracy, strong structural rigidity, and easy realization of the structure

Pending Publication Date: 2018-02-09
NANJING UNIV OF POSTS & TELECOMM
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this type of motor, three control signals with different frequencies are required, which increases the difficulty of control and the overall rigidity is not strong

Method used

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  • Single piezoelectric stack-based inertial nanometer stepping motor
  • Single piezoelectric stack-based inertial nanometer stepping motor
  • Single piezoelectric stack-based inertial nanometer stepping motor

Examples

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Embodiment Construction

[0025] The present invention is described in further detail now in conjunction with accompanying drawing.

[0026] Combined with the micro-nano motor based on the shear piezoelectric stack disclosed in the invention with the publication number CN107086812ACN and the name "a micro-nano motor based on the shear piezoelectric stack", the present invention sticks the inner wall of the original guide groove Four silicon nitride balls are connected to reduce the friction between them and the sliding rod. At the same time, the present invention only uses one piezoelectric stack for inertial drive. By adjusting the pressing force of the beryllium copper spring on the sliding rod, The maximum static friction force between the force transmission block and the sliding rod is adjusted, the friction force is adjustable, and the overall structure is simple and easy to realize.

[0027] Such as figure 1 As shown, an inertial nanometer stepper motor based on a single piezoelectric stack in t...

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Abstract

The invention discloses an inertial nanometer stepper motor based on a single piezoelectric stack, comprising a base, a piezoelectric stack, a rigid force transmission block, and a flexible force transmission block (composed of a beryllium copper spring sheet and two Screws) and sliders. The piezoelectric stack is vertically fixed on the base by shorting the positive and negative poles to each other, and a sawtooth wave voltage driving signal is applied to it, and the rigid force transmission block is bonded and fixed to the free end of the piezoelectric stack, and The flexible force transmission block fixes the slide bar by extrusion, and the extrusion pressure satisfies: the maximum static friction force of the rigid force transmission block and the flexible force transmission block on the slide bar is slightly greater than the gravity of the slide bar itself. The structure of the invention is simple and easy to manufacture, and only one piezoelectric stack and one sawtooth wave voltage driving signal are needed to control the step-by-step movement of the slider. At the same time, the invention has adjustable friction, controllable driving force, strong rigidity, and nano Class stepping accuracy, suitable as a fine-tuning positioning device for a micro-scanning probe microscope under extreme conditions.

Description

technical field [0001] The invention belongs to the technical field of piezoelectric positioners, and relates to a micro-drive system, in particular to an inertial nanometer stepper motor based on a single piezoelectric stack. Background technique [0002] Nanotechnology is a science and technology that uses single atoms and molecules to manufacture substances, and studies the properties and applications of materials with structural dimensions in the range of 0.1 to 100 nanometers. With the development of nanoscience and technology, a series of new science and technology have been triggered, such as nanophysics, nanobiology, nanochemistry, nanoelectronics and nanometrics, and nanomotors are used in nanotechnology research. Novel microactuation systems for nanopositioning and nanomeasurement. [0003] The nano stepper motor is a piezoelectric positioner that can simultaneously achieve nanometer-level positioning accuracy and centimeter-level travel. On the basis of this, th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/02H02N2/04
CPCH02N2/025H02N2/043
Inventor 庞宗强周泽清张悦
Owner NANJING UNIV OF POSTS & TELECOMM
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