Two-dimensional fast deflection stage and method integrating sensing unit and restraint element

Abstract

A two-dimensional fast deflection table integrating a sensing unit and a constraint element, and a method. The deflection table comprises X-axis and Y-axis angular displacement sensing measurement devices (3, 4) which are located between a micro-angle pendulum platform 1 and a base 2, a double-axis flexible hinge 10 being arranged on the lower surface of the micro-angle swinging platform; and the deflection table also comprises four linear voice coil motors (6, 7, 8, 9); the X-axis and Y-axis angular displacement sensing measurement devices (3, 4) each comprise a pair of flexible metal beams (3-1, 3-2) projecting from two opposite sides of a rigid support 5 and mass blocks (3-3, 3-4) which are fixedly connected to the tail ends of the flexible metal beams (3-1, 3-2); a strain gauge is attached to upper and lower surfaces near the root of each flexible metal beam (3-1, 3-2); the first and third voice coil motors (6, 7) are oppositely arranged using the same specifications and form a first actuator set; the second and fourth voice coil motors (8, 9) are oppositely arranged using the same specifications and are perpendicular to the first actuator set in a cross arrangement; With the present invention, the constraining rigidity of the deflection table is increased by means of the flexible metal beams; meanwhile, the deflection table serves as a sensing unit for performing real-time measurement of double-axis deflection angles in a strain feedback mode.

Description

technical field [0001] The invention relates to the technical field of micro-angular displacement two-dimensional rapid deflection actuation, in particular to a two-dimensional rapid deflection table integrating a sensing unit and a constraint element, an actuation method and a micro-angle sensing and measuring method. Background technique [0002] In recent years, with the rapid development of microelectronics engineering, aerospace engineering, bioengineering and other fields, micro-angle two-dimensional fast deflection tables have been widely used in astronomical telescopes, image stabilization control, precise pointing of spacecraft communications, and satellite imaging. and play an increasingly important role. Although the current piezoelectric-driven micro-angle actuating platform is small in size and high in resonant frequency, it has disadvantages such as high driving voltage and small actuating stroke, and the actuating mechanism often needs to install additional de...

AI Technical Summary

Problems solved by technology

Although the current piezoelectric-driven micro-angle actuating platform is small in size and high in resonant frequency, it has disadvantages such as high driving voltage and small actuating stroke, and the actuating mechanism often needs to install additional devices such as eddy current displacement sensors to measure Biaxial deflection angle

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