A method of iad plating for improving laser damage threshold and surface shape of optical devices

Abstract

The invention belongs to the technical field of an optical coating and specifically relates to a plating method for increasing laser damage threshold and surface accuracy of an IAD plated high-reflectivity optical film. The method comprises the following steps: (1) processing a substrate, namely with ultraviolet fused quartz as the substrate, processing the substrate with a water-area ultra-smooth polishing technology, wherein the substrate meets the requirements that the roughness Ra value is more than 2 angstroms, the surface accuracy is more than lambda / 15 and the smoothness is more than 10 / 5; (2) cleaning the substrate, namely soaking the substrate acquired in the step 1) into an ultrasonic cleaning stock solution, taking out and then washing with deionized water, performing ultrasonic cleaning in a continuous ultrasonic wave tank, slowly taking out from water, baking under a spot lamp, wiping with an alcohol ether agent, and putting into a vacuum chamber for plating. According to the invention, the laser damage threshold and the surface accuracy are greatly promoted and the plated coating has the advantages of high compactness, less absorption, less scattering, simple operation method and stable product index.

Description

technical field [0001] The invention belongs to the technical field of optical coating, and specifically refers to a coating method for simultaneously improving the laser damage threshold and the surface shape of a highly reflective optical film coated with IAD. Background technique [0002] With the continuous improvement of industry (laser marking machine, laser cutting machine), medical laser equipment and military requirements on laser output power and spot quality, the damage threshold and surface shape of laser cavity mirror high reflective film are increasingly raised. How to prepare an all-dielectric laser reflective film that can not only have a high laser damage threshold but also meet high laser beam quality has become a hot research topic for domestic and foreign scholars, and it is also the goal pursued by optical coating companies. Most enterprises and research institutions adopt the method of electron gun thermal evaporation. The film layer deposited by this m...

AI Technical Summary

Problems solved by technology

Most enterprises and research institutions adopt the method of electron gun thermal evaporation. The film layer deposited by this method is relatively loose and has serious surface defects, while a few enterprises use ion beam sputtering (IBS) coating, but the stress is large, resulting in surface shape changes. Large, the quality of the output light spot can not meet the use requirements

Some enterprises and institutions use the method of post-plating post-treatment to increase the damage threshold, but the threshold increase is not obvious, and the surface shape does not change much when the stress is released by heating, and it will rebound as the use time increases