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Testing system, testing method, testing structure and manufacturing method of thin film material

A technology for testing structural and thin film materials, applied in the direction of analyzing materials, testing material strength using stable tension/pressure, measuring devices, etc., can solve the problems of difficult testing and complex uniaxial tensile testing methods.

Active Publication Date: 2017-08-18
NAT CENT FOR ADVANCED PACKAGING +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In view of this, the embodiment of the present invention provides a test system, a test method, a test structure and a manufacturing method for a film material, so as to solve the problems in the prior art that the uniaxial tensile test method of the film material is complicated and difficult to test

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  • Testing system, testing method, testing structure and manufacturing method of thin film material
  • Testing system, testing method, testing structure and manufacturing method of thin film material
  • Testing system, testing method, testing structure and manufacturing method of thin film material

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Embodiment Construction

[0043] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only the parts related to the present invention are shown in the drawings but not all of them.

[0044] figure 1 It is a schematic top view structure diagram of a thin film material testing system provided by an embodiment of the present invention. Such as figure 1 As shown, the testing system of the film material provided by the embodiment of the present invention includes a support frame 110 and a tension device (not shown);

[0045] The support frame 110 includes fixing parts 111 at both ends, and protective strips 112 for connecting the fixing parts 111 at both ends. The fixing parts 111 and the protective strip...

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Abstract

The embodiment of the invention discloses a testing system, a testing method, a testing structure and a manufacturing method of a thin film material. The testing system comprises a support framework and tension equipment, wherein the support framework comprises fixing parts and a protecting strip; the fixing parts are positioned at both ends of the support framework, and the protecting strip is used for connecting the fixing parts at the both ends; the fixing parts and the protecting strip form a hollow structure in an enclosing way; the fixing parts at the both ends are used for fixing both ends of the testing structure; a clamp is arranged on the tension equipment, and is used for clamping the fixing parts at the both ends of the support framework and both ends of the testing structure to perform tension test. The testing system has the advantages that the single-axis tension testing of the thin film material is simple, and the special requirement on the tension equipment and the clamp is lowered.

Description

technical field [0001] The invention relates to the field of uniaxial tensile testing, in particular to a testing system, a testing method, a testing structure and a manufacturing method of a film material. Background technique [0002] In the existing uniaxial tensile test for film samples, micro-processing technology is used to form a test structure, the test structure is connected to a support beam, and the uniaxial tensile test is performed through a mobile platform and tensile equipment. However, the disadvantage of this method is that since the suspended test structure is connected by support beams, the force borne by the test structure also needs to take into account the influence of the deformation of the support beams, which may cause additional errors; and because the deformation of the test structure cannot be too large, it is not suitable Test materials with large deformation; in addition, the entire test device needs to be observed and measured in a scanning ele...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N3/08G01N3/02
CPCG01N3/02G01N3/08G01N2203/0017G01N2203/0282
Inventor 王磊张文奇王珺杨辰
Owner NAT CENT FOR ADVANCED PACKAGING
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