Silicon-based cantilever coupled indirect heating millimeter-wave signal detection instrument

Abstract

A silicon-based cantilever beam coupling indirect heating type millimeter wave signal detection instrument provided by the invention comprises three modules of sensors, analog-to-digital conversion and liquid crystal display, a sensor module comprises a cantilever beam coupling structure, a power distributor / combiners, indirect heating type microwave power sensors and switches, the substrate material is high-resistance Si, and power is detected through the indirect heating type microwave power sensors of a CPW signal line terminal corresponding to input ports; frequency detection is realized by use of the indirect heating type microwave power sensors to measure synthesis power of two paths of coupling signals whose phase difference at a center frequency is 90 degrees; and as for phase detection, the two paths of coupling signals whose phase difference at the center frequency is 90 degrees are synthesized with two paths of equally divided reference signals, and the indirect heating type microwave power sensors are also utilized to detect the synthesis power, thereby obtaining the phase of signals to be measured. The analog-to-digital conversion is realized by an MCS51 single-chip microcomputer, and the liquid display part consists of three liquid crystal display screens.

Description

technical field [0001] The invention provides a silicon-based cantilever beam coupled indirect heating millimeter-wave signal detection instrument, which belongs to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] Millimeter waves belong to microwaves in the higher frequency band, and are of great significance in communication, radar, guidance, remote sensing technology, radio astronomy, clinical medicine and spectroscopy. As the three basic parameters of microwave signals, the detection of power, frequency and phase plays an important role in millimeter wave systems. Based on the continuous development and maturity of MEMS technology, many electronic components and mechanical components have been successfully miniaturized, and their performance is no less than that of traditional components, and microwave signal detectors are no exception. However, currently existing microwave signal detectors, including power detectors, frequen...

AI Technical Summary

Problems solved by technology

However, currently existing microwave signal detectors, including power detectors, frequency detectors and phase detectors, are relatively independent devices, and in microwave systems where power, phase and frequency need to be measured simultaneously, independent devices The size of the circuit is relatively large, and there are electromagnetic compatibility problems at the same time, so the research on the integrated detection system of millimeter wave signals has become the trend of future development.

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