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Thermal loss type air velocity sensor and preparation method and detection method thereof

A wind speed sensor and heat loss technology, which is applied in the direction of measuring fluid velocity by using thermal variables, can solve the problems of reducing the reliability of the sensor and the bonding wire is easy to break, so as to achieve front wireless heating and wireless temperature measurement, improve sensitivity, reduce The effect of power consumption

Active Publication Date: 2017-05-31
SOUTHEAST UNIV
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Problems solved by technology

Micro-electronic machinery (MEMS) wind speed sensor adopts the working method of frontal wind sensing. Although the sensitivity is high, through-hole technology or bonding technology is inevitable. Not only that, but at high wind speed, the bonding wire is easy to break, thereby reducing the reliability of the sensor. sex

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  • Thermal loss type air velocity sensor and preparation method and detection method thereof
  • Thermal loss type air velocity sensor and preparation method and detection method thereof
  • Thermal loss type air velocity sensor and preparation method and detection method thereof

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Embodiment Construction

[0025] The present invention will be further described below in conjunction with the accompanying drawings.

[0026] see figure 1 , figure 2 with image 3 , The heat loss wind speed sensor provided by the present invention includes a glass substrate 1 , a silicon dioxide layer 2 on the front of the glass substrate, a heating inductance coil 3 , and a heating inductance coil 4 . Wherein, the thermal conductivity of the glass substrate 1 can be less than 10; of course, theoretically speaking, there is no requirement for the thermal conductivity of the substrate, but in order to improve the sensitivity, it is better to use glass. The heating inductance coil 3, that is, the heating element, is grown on the silicon dioxide layer 2 on the front side of the glass substrate 1, and the central line end of the heating inductance coil 3 passes through the silicon dioxide layer 2 and is connected to the external line end to form a closed loop , by applying an alternating current to th...

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Abstract

The invention discloses a thermal loss type air velocity sensor which comprises an insulating substrate, a heating inductive coil and a radiation inductive coil, wherein the heating inductive coil is arranged on the back side of the insulating substrate, and the radiation inductive coil is arranged on the front side of the insulating substrate and is right opposite to the position of the heating inductive coil; a silicon dioxide layer is arranged on the front side of the insulating substrate, and two end terminals of the heating inductive coil are connected in the silicon dioxide thin layer so as to form a closed loop circuit. At the same time, the invention further discloses a preparation method of the thermal loss type air velocity sensor and an air velocity detection method based on the thermal loss type air velocity sensor. Front side air sensing is realized, the sensitivity of the air velocity sensor is improved, and power consumption of the air velocity sensor is reduced; the lead problem is solved by the interreaction of the inductive coils on the front side and the back side, front side wireless heating and wireless temperature measuring are realized, and the bonding wire technology and the substrate through-hole technology are avoided.

Description

technical field [0001] The invention proposes a heat loss wind speed sensor based on passive wireless technology, a preparation method and a detection method thereof, and belongs to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] Wind speed detection plays a very important role in many fields such as industrial and agricultural production, energy development, transportation and tourism, weather forecast and Internet of Things. Micro-electronic machinery (MEMS) wind speed sensor adopts the working method of frontal wind sensing. Although the sensitivity is high, through-hole technology or bonding technology is inevitable. Not only that, but at high wind speed, the bonding wire is easy to break, thereby reducing the reliability of the sensor. sex. Contents of the invention [0003] In order to solve the above problems, the present invention provides a heat loss type wind speed sensor and its detection method, which can avoid the...

Claims

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Application Information

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IPC IPC(8): G01P5/12
CPCG01P5/12
Inventor 易真翔董蕾王立峰秦明黄庆安
Owner SOUTHEAST UNIV
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