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A xyz three-degree-of-freedom precision positioning device

A technology with precise positioning and degrees of freedom, applied in the micro-nano field, can solve problems such as complex structure and difficult assembly, and achieve the effects of high motion sensitivity, large rotation range, and compact structure

Active Publication Date: 2018-01-16
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Based on the principle of three-stage differential lever amplification, a flexible mechanical displacement amplifier with millimeter-level travel and nanometer-level precision is designed. The current three-dimensional platform has the following disadvantages; there is kinematic coupling in the three directions of XYZ, especially in the case of high speed and high acceleration. The swing phenomenon in the Z-axis direction is obvious, and the structure is complex and difficult to assemble.

Method used

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  • A xyz three-degree-of-freedom precision positioning device
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  • A xyz three-degree-of-freedom precision positioning device

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Embodiment Construction

[0031] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and through specific implementation methods.

[0032] like Figure 1-5 As shown, an XYZ three-degree-of-freedom precision positioning device includes an XY motion base 100 and a Z-axis motion module 200, and the Z-axis motion module 200 is installed on the XY motion base 100;

[0033] The XY motion base 100 includes a base plate 110, on which a displacement device 300 and a motion platform 400 are arranged, and the displacement device 300 is provided with two groups, and the displacement device 300 is respectively located on the X axis and the Y axis; The displacement device 300 is a flexible mechanism provided with a piezoelectric ceramic E;

[0034] The displacement device 300 includes a left lever 310, a right lever 320, an input mounting block 330 and an output mounting block 340; the base plate 110 is provided with a first accommodation gr...

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Abstract

An XYZ three-freedom-degree precise positioning device comprises an XY motion base and a Z axis motion module; the Z axis motion module is mounted on the XY motion base, and the XY motion base comprises a base plate; displacement devices and a motion platform are arranged on the base plate, two displacement devices are located on the X axis and the Y axis correspondingly, and are flexible mechanisms with piezoelectric ceramics, and each displacement device comprises a left lever, a right lever, an input end mounting block and an output end mounting block, first containing grooves are formed in the base plate, the displacement devices are mounted in the first containing grooves, the lower ends of the left levers and the lower ends of the right levers are hinged to the lower groove walls of the first containing grooves through hinges, the input end mounting blocks are hinged to the lower portions of the right sides of the left levers and the lower portions of the left sides of the right levers through hinges, the output end mounting blocks are hinged to the upper portions of the right sides of the left levers and the upper portions of the left sides of the right levers through straight beam type flexible hinges, and the output end mounting blocks are mounted on the motion platform through the straight beam type flexible hinges.

Description

technical field [0001] The invention relates to the field of micro-nano technology, in particular to an XYZ three-degree-of-freedom precision positioning device. Background technique [0002] With the increasing development of science and technology and the continuous improvement of nanotechnology, in order to pursue a good quality of life, many fields put forward higher requirements for micro-nano-level positioning platforms. For example, ultra-precision manufacturing, 3D printing, biological cell engineering, chip lithography machines and wire sewing machines all have high precision and dimension requirements for micro-nano platforms. [0003] Based on the principle of three-stage differential lever amplification, a flexible mechanical displacement amplifier with millimeter-level travel and nanometer-level precision is designed. The current three-dimensional platform has the following disadvantages; there is kinematic coupling in the three directions of XYZ, especially in ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B25J9/00B25J9/08
CPCB25J9/00B25J9/08
Inventor 陈新汤晖邱迁何思丰向晓彬车俊杰陈创斌李宏城高健贺云波尹志强陈云
Owner GUANGDONG UNIV OF TECH
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