A xyz three-degree-of-freedom precision positioning device
A technology with precise positioning and degrees of freedom, applied in the micro-nano field, can solve problems such as complex structure and difficult assembly, and achieve the effects of high motion sensitivity, large rotation range, and compact structure
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[0031] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and through specific implementation methods.
[0032] like Figure 1-5 As shown, an XYZ three-degree-of-freedom precision positioning device includes an XY motion base 100 and a Z-axis motion module 200, and the Z-axis motion module 200 is installed on the XY motion base 100;
[0033] The XY motion base 100 includes a base plate 110, on which a displacement device 300 and a motion platform 400 are arranged, and the displacement device 300 is provided with two groups, and the displacement device 300 is respectively located on the X axis and the Y axis; The displacement device 300 is a flexible mechanism provided with a piezoelectric ceramic E;
[0034] The displacement device 300 includes a left lever 310, a right lever 320, an input mounting block 330 and an output mounting block 340; the base plate 110 is provided with a first accommodation gr...
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