A shock wave excitation device for non-contact underwater excitation of mems microstructures

Abstract

The invention discloses a shock wave excitation device for non-contact underwater excitation of MEMS microstructures. It includes a base plate, two electric slides are symmetrically arranged on the base plate, and a water tank unit and a water tank unit are arranged between the two electric slides. On the support, the needle electrode units are symmetrically installed on the electric slide table through the manual biaxial translation stage, and the needle electrode units are respectively suspended into the tank of the water tank unit; the microstructure unit is installed on the support, and the microstructure unit is suspended to the water tank In the box of the unit; the needle electrodes of the two needle electrode units are respectively electrically connected to the two poles of the high-voltage capacitor, and a first air switch is arranged between the high-voltage capacitor and one needle electrode; the two poles of the high-voltage capacitor are respectively electrically connected to the high-voltage power supply The positive and negative poles are controlled by the second air switch. The device can not only excite the MEMS microstructure in water, but also prevent the vibration response of the base structure from interfering with the test results, realize the non-contact excitation of the MEMS microstructure, and have a good excitation effect.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, and in particular relates to a shock wave excitation device for non-contact underwater excitation of MEMS microstructures. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. In addition, the dynamic characteristic test of MEMS microstructure needs to take into accoun...

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Problems solved by technology

However, the working principle of this device is to use the shock wave generated by the needle electrode and the plate electrode to discharge in the air to excite the microstructure, so it cannot be used to excite the MEMS microstructure in water. In addition, the device uses an elastic base The excitation method excites the MEMS microstructure, so when the dynamic characteristics of the MEMS microstructure are tested by the non-contact optical vibration measurement method, the vibration response signal obtained will inevitably include the vibration response of the elastic base structure , which will make it very difficult to obtain the dynamic characteristic parameters of the MEMS microstructure

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