High-throughput multi-modal characterization system and method based on micro-nano manipulation robot

Abstract

The invention discloses a high-throughput multi-mode representation system and method based on a micro-nano manipulation robot. The high-throughput multi-mode representation system based on the micro-nano manipulation robot is applied under a scanning electron microscope and mainly comprises the micro-nano manipulation robot, a testing unit switching device and multi-mode testing units. The method adopted by the system comprises the following steps of: quickly locking a destination by using the large visual field search capability of the scanning electron microscope; driving the micro-nano manipulation robot to carry out accurate micro manipulation on represented objects; and realizing rapid switching of the multi-mode testing units by controlling the testing unit switching device to achieve the purposes of automatic change of end effectors and concurrent implementation of multiple performance representation, thereby realizing high-throughput multi-mode representation testing. The high-throughput multi-mode representation system has the characteristics of high-throughput multi-mode representation capability, fast manipulation speed, high representation efficiency and the like.

Description

Technical field [0001] The invention discloses a high-throughput multi-mode characterization system and method based on a micro-nano operation robot, belonging to the fields of micro-nano technology, micro-nano operation technology and testing technology. Background technique [0002] Experimental methods are an important method of material science research. Different experimental instruments and methods can be used to test and characterize the performance of new synthetic materials or microstructures, thereby realizing the establishment of a large database of materials, which is also the pursuit of the concept of "materials genome" aims. At present, the atomic force microscope (AFM) is a commonly used instrument for testing and characterizing materials or microstructures. Its resolution can reach the atomic level, and it has excellent force or electrical performance testing capabilities and microscopic three-dimensional topography imaging capabilities. However, due to the limit...

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Problems solved by technology

[0003] In order to overcome the deficiencies of the above-mentioned prior art, the present invention provides a high-throughput multi-mode characterization system and method based on a micro-nano manipulator robot, which solves the problems of single characterization mode and low characterization efficiency of existing test instruments, and at the same time integrates micro The integration of nano-manipulation robots for high-throughput multi-mode testing under the scanning electron microscope can realize the functions of fast search for targets, precise micro-area manipulation and multi-dimensional performance characterization. It has high-throughput multi-mode characterization capabilities, and has fast control speed and characterization efficiency advanced features

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