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A system and method for detecting the vacuum degree of a vacuum device based on laser-induced spectral breakdown technology

A technology of technology detection and vacuum device, applied in the field of detection of vacuum degree of vacuum device based on laser-induced spectral breakdown technology, to achieve the effect of small damage and small spots

Active Publication Date: 2019-06-11
XI AN JIAOTONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The above vacuum gauges need to be in contact with the vacuum chamber to be tested, which is not applicable in some special environments (such as nuclear radiation)

Method used

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  • A system and method for detecting the vacuum degree of a vacuum device based on laser-induced spectral breakdown technology
  • A system and method for detecting the vacuum degree of a vacuum device based on laser-induced spectral breakdown technology

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Embodiment Construction

[0027] Below in conjunction with accompanying drawing, the present invention is described in further detail:

[0028] see figure 1 , a system for detecting the vacuum degree of a vacuum device based on laser-induced spectral breakdown technology, comprising a vacuum chamber 4, an air outlet 11, a first observation window 7, and a second observation window 8. The measured vacuum device is composed of a nanosecond A vacuum degree detection system composed of a laser 1, a digital delay generator 2, a spectrometer 3, an image intensifier (ICCD) 10, an optical lens 9, a lens 6 and a metal target 5.

[0029] The vacuum chamber 4 refers to the vacuum chamber of any vacuum device, its size can at least accommodate a metal target 5 with a diameter of 1 cm, and the vacuum chamber 4 has at least two observation windows and an air outlet 11, the first observation window 7 is mainly used for Through the laser beam, the second observation window 8 is mainly used to collect the self-lumines...

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Abstract

The invention discloses a system and method for detecting the vacuum degree of a vacuum device based on a laser-induced breakdown spectroscopy. According to the method disclosed by the invention, a target material in a vacuum chamber is ablated through utilizing laser focusing so as to generate plasmas; a plasma spectrum is measured through focusing of an optical camera lens, light splitting of a spectrograph, and imaging of an image intensifier. The plasma spectrums under different air pressure environments are measured for a plurality of times and a relation between the plasma spectrum and air pressure is analyzed and found. By utilizing the relation, the air pressure of the vacuum chamber can be obtained through measuring the plasma spectrum.

Description

technical field [0001] The technical field of vacuum detection of the present invention particularly relates to a system and method for detecting the vacuum degree of a vacuum device based on laser-induced spectral breakdown technology. Background technique [0002] In production and experiments, some special events need to be realized in a vacuum environment. For example, high-voltage electrical appliances commonly used in power systems—vacuum circuit breakers. In order to improve the withstand voltage of the switch and enhance the breaking capacity of the switch, vacuum is often selected as the environment of the interrupter. Another example is in the Z-pinch experiment, in order to realize the implosion and pinch of the metal wire array, the vacuum degree is generally required to be lower than 10 -5 Pa. In order to achieve a vacuum environment, the excess air is usually extracted through a combination of a mechanical pump and a molecular pump. However, it needs a spec...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/63G01L21/26
CPCG01L21/26G01N21/63
Inventor 杨泽锋李兴文吴坚贾申利魏文赋
Owner XI AN JIAOTONG UNIV
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