Nanometer-displacement-bench six-degree-of-freedom calibrating device

Abstract

The invention discloses a six-degree-of-freedom nanometer-displacement-bench calibrating device based on light splitting laser interference and belongs to the laser precision range finding technology field. The device comprises a supporting platform, a light splitting measurement apparatus system and a nanometer displacement bench. Through the above design, nanometer-moving-platform six-degree-of-freedom attitude measurement is guaranteed; an any attitude nanometer scale displacement measurement problem is solved; and the device is suitable for all-attitude identification and ultra-precision measurement calibration of a nanometer-displacement-bench simultaneous change of an X axis, a Y axis, a Z axis and a rotation angle.

Description

technical field [0001] The invention belongs to the field of calibration of a nanometer displacement platform, and in particular relates to a six-degree-of-freedom calibration device for a nanometer displacement platform. Background technique [0002] At present, two methods of single-axis interferometer and multi-axis interferometer are generally used to calibrate the nano-displacement stage, but both of these two measurement methods have certain technical defects, and the specific defects are as follows: [0003] Calibrate nanostages using single-axis interferometer measurements. When measuring, the single-axis interferometer can only measure the displacement or angle of one axis. If the multi-degree-of-freedom measurement of the nanometer displacement stage is to be realized, the number of interferometers and plane mirrors must be increased, and the orthogonality of the plane mirror position is difficult to be guaranteed. It increases the difficulty of installation and d...

AI Technical Summary

Problems solved by technology

When measuring, the multi-axis interferometer can realize the simultaneous measurement of the displacement and angle in a certain axis direction, and the measurement of the nano-displacement stage by using multiple multi-axis interferometers and plane mirrors can realize the measurement of the six degrees of freedom of the nano-displacement stage, but due to Due to the influence of optical path layout and other factors, the multi-axis interferometer is far away from the measuring mirror, and there will be a large dead optical path error

Moreover, the laser light emitted by the laser directly enters the multi-axis interferometer after passing through the beam splitter and reflector. Since the measurement displacement is based on the laser wavelength, when the air temperature, pressure, humidity and other factors change, the wavelength of the laser in the air will be changed. , making the measurement results inaccurate

Although wavelength compensation is possible, it cannot fully compensate for the effects of air fluctuations

[0005] To sum up, there is currently no measuring instrument that can directly trace the value, has a millimeter-level measurement range and nanometer-level measurement accuracy, and can be directly traced to the definition of "meter" in the International System of Units.

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