Nanometer-displacement-bench six-degree-of-freedom calibrating device

A technology of calibration device and displacement stage, which is applied in the direction of measuring device, optical device, instrument, etc., can solve the problems that the influence cannot be fully compensated, the distance between the multi-axis interferometer and the measuring mirror is far, and the measurement result is inaccurate, etc., so as to achieve stable mechanical performance Reliable, reduce Abbe error and cosine error, and ensure the effect of mechanical performance

Inactive Publication Date: 2016-10-26
NAT INST OF METROLOGY CHINA
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Problems solved by technology

When measuring, the multi-axis interferometer can realize the simultaneous measurement of the displacement and angle in a certain axis direction, and the measurement of the nano-displacement stage by using multiple multi-axis interferometers and plane mirrors can realize the measurement of the six degrees of freedom of the nano-displacement stage, but due to Due to the influence of optical path layout and other factors, the multi-axis interferometer is far away from the measuring mirror, and there will be a large dead optical path error
Moreover, the laser light emitted by the laser directly enters the multi-axis interferometer after passing th...

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[0021] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be described in detail below. Apparently, the described embodiments are only some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other implementations obtained by persons of ordinary skill in the art without making creative efforts fall within the protection scope of the present invention.

[0022] Such as figure 1 , figure 2 with image 3 As shown, the present invention provides a six-degree-of-freedom calibration device for a nano-displacement stage, including: a support system, a laser system and a measurement system, the support system includes a support platform and an air-floating platform, and the laser system is arranged on the support platform Above, the measurement system is arranged on the air-floating platform, and the laser system i...

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Abstract

The invention discloses a six-degree-of-freedom nanometer-displacement-bench calibrating device based on light splitting laser interference and belongs to the laser precision range finding technology field. The device comprises a supporting platform, a light splitting measurement apparatus system and a nanometer displacement bench. Through the above design, nanometer-moving-platform six-degree-of-freedom attitude measurement is guaranteed; an any attitude nanometer scale displacement measurement problem is solved; and the device is suitable for all-attitude identification and ultra-precision measurement calibration of a nanometer-displacement-bench simultaneous change of an X axis, a Y axis, a Z axis and a rotation angle.

Description

technical field [0001] The invention belongs to the field of calibration of a nanometer displacement platform, and in particular relates to a six-degree-of-freedom calibration device for a nanometer displacement platform. Background technique [0002] At present, two methods of single-axis interferometer and multi-axis interferometer are generally used to calibrate the nano-displacement stage, but both of these two measurement methods have certain technical defects, and the specific defects are as follows: [0003] Calibrate nanostages using single-axis interferometer measurements. When measuring, the single-axis interferometer can only measure the displacement or angle of one axis. If the multi-degree-of-freedom measurement of the nanometer displacement stage is to be realized, the number of interferometers and plane mirrors must be increased, and the orthogonality of the plane mirror position is difficult to be guaranteed. It increases the difficulty of installation and d...

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Application Information

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IPC IPC(8): G01B11/02G01B11/26
CPCG01B11/02G01B11/26
Inventor 施玉书高思田李庆贤王兴旺李伟李琪李适王鹤群皮磊张树郭鑫沈飞
Owner NAT INST OF METROLOGY CHINA
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