A tunable terahertz metamaterial filter based on low-voltage driving liquid crystal material and its preparation method

A liquid crystal material and filter technology, which is applied in the field of tunable terahertz metamaterial filter and its preparation, can solve the problems of complex structure and preparation process, fixed working wavelength, limited working bandwidth, etc., and achieves simple structure and narrow working bandwidth. , the effect of small width

Inactive Publication Date: 2019-02-12
HARBIN UNIV OF SCI & TECH
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] In order to solve the problems of fixed working wavelength, limited working bandwidth, narrow application range, complex structure and preparation process, low reliability and high preparation cost of the existing terahertz metamaterial filter, the present invention proposes a low-voltage drive based Tunable terahertz metamaterial filter of liquid crystal material and preparation method thereof

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  • A tunable terahertz metamaterial filter based on low-voltage driving liquid crystal material and its preparation method
  • A tunable terahertz metamaterial filter based on low-voltage driving liquid crystal material and its preparation method
  • A tunable terahertz metamaterial filter based on low-voltage driving liquid crystal material and its preparation method

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specific Embodiment approach 1

[0040] Specific implementation mode 1: Combination Figure 1~4 , Image 6 with Figure 7 To explain this embodiment, this embodiment is a tunable terahertz metamaterial filter based on a low-voltage drive liquid crystal material. The filter is a multilayer flat plate and includes a glass substrate layer 1, a first metal structure layer 2, and an insulating layer. 3. Metal seed layer 4, second metal structure layer 5, liquid crystal material 6 and glass cover plate 7;

[0041] The first metal structure layer 2 is arranged on the upper surface of the glass substrate layer 1. The first metal structure layer 2 is composed of cylindrical metal 2-1 arranged in a rectangular array and a strip metal 2- connected to the cylindrical metal 2-1. 2 composition;

[0042] The insulating layer 3 is arranged in the area enclosed by the cylindrical metal 2-1 and the elongated metal 2-2, and the upper surface of the elongated metal 2-2; the upper surface of the insulating layer 3 is flat;

[0043] The...

specific Embodiment approach 2

[0054] Specific implementation manner two: combination figure 2 This embodiment is described. The difference between this embodiment and the first embodiment is that the cylindrical metal 2-1 and the elongated metal 2-2 are Ni, Cr, Al, Ag, Au or Cu, and the cylindrical metal 2 The height of -1 and the elongated metal 2-2 is 0.2 to 1 μm. The other steps and parameters are the same as in the first embodiment.

specific Embodiment approach 3

[0055] Specific implementation mode three: combination image 3 To describe this embodiment, the difference between this embodiment and the first or second embodiment is that the insulating layer 3 is made of silicon dioxide, silicon nitride, aluminum oxide, photoresist, polyimide, and benzocyclobutene. Or polydimethylacrylamide. The other steps and parameters are the same as one of the first to fourth embodiments.

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Abstract

The invention relates to a filter of tunable terahertz metamaterial and a preparation method thereof based on low-voltage-driven liquid crystal material with the aim of solving problems of an existing filter of tunable terahertz metamaterial such as fixed working wavelength, limited working bandwidth, narrow application scope, complicated structure and preparation technology and low reliability. The filter is in the structure of a multi-layer flat plate and comprises a glass substrate layer, a first metal structure layer, an insulation layer, a metal seed layer, a second metal structure layer, liquid crystal material and a glass cover plate. The preparation method comprises following steps: first, preparation of metal structure layers; second, preparation of the insulation layer; third, preparation of the metal seed layer; fourth, preparation of a mould structure used for electroplating; fifth, preparation of a periodic slit-metal structure; sixth, filling of liquid crystal material and covering with the glass cover plate. The filter of tunable terahertz metamaterial and the preparation method thereof based on low-voltage-driven liquid crystal material have following beneficial effects: the filter is low in needed voltage, simple in structure, wide in tuning range, high in response speed and good in chemical stability and is not sensitive to polarization; and the method is suitable for preparation of filter of tunable terahertz metamaterial filter of tunable terahertz metamaterial.

Description

Technical field [0001] The invention relates to a tunable terahertz metamaterial filter based on low-voltage driving liquid crystal material and a preparation method thereof Background technique [0002] Metamaterial is an artificial electromagnetic material composed of periodically arranged sub-wavelength structural units. Its electromagnetic characteristics depend on the shape, size and arrangement of the structural units. The reasonable design of the structural units can effectively control the propagation of electromagnetic waves and achieve Extraordinary electromagnetic properties that natural materials do not possess, such as negative refraction, electromagnetic stealth, and optical transformation. At present, with the deepening of research on metamaterials, its operating frequency has expanded from the initial microwave band to the terahertz wave and visible light region. Terahertz (Terahertz) wave refers to the electromagnetic spectrum with a frequency of 0.1 to 10 THz, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/13G02F1/1343
CPCG02F1/1313
Inventor 贺训军石爽杨兴宇李少鹏吴丰民姜久兴
Owner HARBIN UNIV OF SCI & TECH
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